{"id":"W3039821702","doi":"","title":"Germanium Anisotropic Etching for Infrared Antireflective Gratings","year":2004,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Optical Coatings and Gratings","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Anti-reflective coating; Germanium; Materials science; Etching (microfabrication); Infrared; Optoelectronics; Anisotropy; Optics; Computer science; Silicon; Nanotechnology; Physics","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004014263,0.0005815307,0.0003569873,0.0006100871,0.0008871674,0.0007871542,0.000778149,0.0003420408,0.008751848],"category_scores_gemma":[0.0002973946,0.000462866,0.0003138563,0.0002980289,0.000301228,0.0003523699,0.0003190998,0.0005363976,0.001201039],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.002644075,"about_ca_system_score_gemma":0.001623847,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.06342926,"about_ca_topic_score_gemma":0.2895706,"domain_scores_codex":[0.9997166,0.00001101197,0.000007113657,0.00003913997,0.000152171,0.00007393793],"domain_scores_gemma":[0.9998751,0.00001272263,0.00001096973,0.0000149097,0.00006924346,0.00001707982],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002394664,0.00006487522,0.0007388715,0.0001419854,0.0000333886,0.0003759916,0.0001347164,0.001962854,0.9464982,0.005529125,0.01259412,0.03168647],"study_design_scores_gemma":[0.00004570057,0.00009410994,0.004840001,0.00002593118,0.00004477008,0.0002640114,0.00007147125,0.01568532,0.9051468,0.0007004197,0.07304715,0.00003434966],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6523427,0.01267651,0.1406664,0.004317284,0.004444459,0.0006177348,0.001252764,0.005727392,0.1779548],"genre_scores_gemma":[0.5789388,0.005054671,0.05520491,0.0002987712,0.00012875,0.00004134585,0.0008996212,0.0007156394,0.3587175],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.06342926,"threshold_uncertainty_score":0.1261202,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01514138846730837,"score_gpt":0.2534075675242087,"score_spread":0.2382661790569004,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}