{"id":"W3042536558","doi":"10.1364/oe.397489","title":"Vertically tapered waveguide spot size converters fabricated via a linewidth controlled grey tone lithography for InP-based photonic integrated circuits","year":2020,"lang":"en","type":"article","venue":"Optics Express","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Research Council Canada","funders":"","keywords":"Materials science; Coupling loss; Optics; Laser linewidth; Photonic integrated circuit; Tapering; Photolithography; Electronic circuit; Photonics; Optoelectronics; Fabrication; Lithography; Waveguide; Optical fiber; Laser; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009414436,0.0002886593,0.0001450309,0.0001659701,0.0001384767,0.0003034744,0.0003878227,0.0002179484,0.0009401821],"category_scores_gemma":[0.0001999038,0.0002512313,0.0001243894,0.0001342718,0.0002566844,0.0002444306,0.000281997,0.0004030375,0.0002898954],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002683984,"about_ca_system_score_gemma":0.0001883212,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004208173,"about_ca_topic_score_gemma":0.0009972084,"domain_scores_codex":[0.9998538,0.00001158817,0.000007299374,0.00002288488,0.00008746424,0.00001690067],"domain_scores_gemma":[0.9998825,0.00002345984,0.00003594636,0.00002296501,0.00002287185,0.00001221355],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001069786,0.000007824477,0.00009944083,0.00002908574,0.000002875696,0.00005551129,0.00002472326,0.0004135271,0.9950355,0.0005086323,0.00009834157,0.003713838],"study_design_scores_gemma":[0.000004966751,0.0001037605,0.000772016,0.000003140046,0.000004797744,0.000146319,0.000011612,0.003948852,0.9925712,0.0001130203,0.002314799,0.000005539385],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9055437,0.001281384,0.08380991,0.0001858058,0.0001589645,0.00007115152,0.0001984782,0.0005396267,0.008211008],"genre_scores_gemma":[0.9346552,0.0006165068,0.06055384,0.00005908336,0.00002954234,0.0000356009,0.0001119701,0.00006047646,0.003877743],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009401821,"threshold_uncertainty_score":0.003145218,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01406516853458294,"score_gpt":0.2294782298370208,"score_spread":0.2154130613024378,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}