{"id":"W3077998037","doi":"","title":"Plasma-induced damage during III-V semiconductor patterning for photonic and photovoltaic applications: from characterization to minimization","year":2019,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Optical Coatings and Gratings","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Photonics; Photovoltaic system; Characterization (materials science); Optoelectronics; Materials science; Plasma; Minification; Semiconductor; Gallium arsenide; Nanotechnology; Computer science; Electrical engineering; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002263644,0.0002133124,0.0002718639,0.000144696,0.0002566959,0.0004275359,0.0003464276,0.0004727204,0.0009035097],"category_scores_gemma":[0.0004224922,0.0001926526,0.0001268881,0.0002239482,0.0003442102,0.0003658506,0.0002558366,0.0003203957,0.0002577932],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004525472,"about_ca_system_score_gemma":0.000182205,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008689368,"about_ca_topic_score_gemma":0.001278129,"domain_scores_codex":[0.9998,0.0000161648,0.000005923434,0.0000434443,0.0001004031,0.00003404383],"domain_scores_gemma":[0.9997789,0.00007435409,0.00004423707,0.00003043702,0.00006309447,0.000009040257],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006194304,0.00002086688,0.0008419132,0.00008674243,0.00000658892,0.00006377117,0.0001112609,0.0009532468,0.9915845,0.00021361,0.000156382,0.00589902],"study_design_scores_gemma":[0.00000263994,0.0001296674,0.00360897,0.000008545466,0.000006965791,0.000104131,0.00008562765,0.005686501,0.9889182,0.0002070728,0.001236543,0.000005142443],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9803197,0.002050014,0.01375337,0.0001922701,0.00003335503,0.0000393867,0.0001705007,0.0001143811,0.003327136],"genre_scores_gemma":[0.9925276,0.0008205326,0.003228361,0.00003827702,0.00001028147,0.00002459641,0.0001431553,0.00004791719,0.003159327],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009035097,"threshold_uncertainty_score":0.003283501,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01369099323188539,"score_gpt":0.227129273268027,"score_spread":0.2134382800361416,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}