{"id":"W307944692","doi":"10.1023/a:1014899513540","title":"Features of Segregation of Doping Impurities of V(a) Subgroup Elements on Angular Configurations of the Silicon/Silicon Dioxide Oxidation Boundary","year":2002,"lang":"en","type":"article","venue":"Journal of Engineering Physics and Thermophysics","topic":"Industrial Engineering and Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"","keywords":"Arsenic; Antimony; Silicon; Doping; Materials science; Impurity; Metallurgy; Chemistry; Optoelectronics; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001060962,0.0002000444,0.0002168846,0.0007796353,0.0005083992,0.0005957843,0.0004445911,0.0002911493,0.003559693],"category_scores_gemma":[0.0004202799,0.0001776906,0.0001101063,0.0003590678,0.0005661934,0.0002358824,0.0003039672,0.0003098595,0.0002134683],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000304178,"about_ca_system_score_gemma":0.0001542271,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009499571,"about_ca_topic_score_gemma":0.0009139224,"domain_scores_codex":[0.9999261,0.000008950665,0.000002771822,0.00001592664,0.00001860352,0.00002769448],"domain_scores_gemma":[0.9997665,0.00006205855,0.00006096686,0.00002447001,0.00003679524,0.00004915925],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.004216397,0.0001874272,0.02523173,0.0001505924,0.0000644369,0.0009949567,0.0006570843,0.007481387,0.9303486,0.01945046,0.001278027,0.009938908],"study_design_scores_gemma":[0.0003300983,0.0008791203,0.2488022,0.00009379724,0.0001347599,0.001712943,0.001861304,0.1519092,0.5774473,0.01388526,0.00281946,0.0001244866],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9955766,0.00008784456,0.0005661423,0.00003607224,0.000005350781,0.000003204316,0.00008011622,0.00005902737,0.003585797],"genre_scores_gemma":[0.9996766,0.00001065275,0.00008041938,0.000004272929,0.000001371554,0.000002132022,0.00005936039,0.000007081074,0.0001580392],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003559693,"threshold_uncertainty_score":0.01190829,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01042472474164024,"score_gpt":0.1869833247262752,"score_spread":0.1765585999846349,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}