{"id":"W3083119279","doi":"","title":"Fabrication of high aspect ratio (HAR) atomic force microscope (AFM) tips and nano-pillar arrays using pseudo-Bosch and wet etching","year":2020,"lang":"en","type":"dissertation","venue":"UWSpace (University of Waterloo)","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"University of Waterloo","keywords":"Pillar; Atomic force microscopy; Fabrication; Nanotechnology; Etching (microfabrication); Nano-; Materials science; Aspect ratio (aeronautics); Composite material; Engineering; Layer (electronics); Mechanical engineering","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00014045,0.0003751565,0.0003877135,0.0002991411,0.000345061,0.0003529036,0.0006368337,0.0005148123,0.00106613],"category_scores_gemma":[0.000233694,0.0003741441,0.0003091372,0.0002472336,0.0001396527,0.0004737689,0.0003813433,0.000483563,0.001041376],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002058221,"about_ca_system_score_gemma":0.0002136633,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000285559,"about_ca_topic_score_gemma":0.0008155183,"domain_scores_codex":[0.999795,0.000009539777,0.00001642267,0.00005975755,0.00009428172,0.00002492695],"domain_scores_gemma":[0.9998701,0.00002057742,0.00002938718,0.00003161323,0.00003464485,0.00001362261],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001087997,0.00001541859,0.0001193215,0.0001046327,0.000007648845,0.00008860965,0.00003206396,0.0002359091,0.9874682,0.0005890599,0.0003846952,0.01094353],"study_design_scores_gemma":[0.00001045793,0.0001193532,0.0008502335,0.000006192212,0.000009933693,0.0002551626,0.00002005005,0.004399007,0.9855663,0.0001566284,0.008582683,0.00002393843],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"methods","genre_scores_codex":[0.5920055,0.004142371,0.3793039,0.0004394158,0.0006863268,0.0007933433,0.002155704,0.003859143,0.01661429],"genre_scores_gemma":[0.4954234,0.001890194,0.4925275,0.0001855297,0.00008118463,0.000659875,0.0008846606,0.0001729029,0.008174758],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.00106613,"threshold_uncertainty_score":0.003566504,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007890979010982301,"score_gpt":0.2201403087765003,"score_spread":0.212249329765518,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}