{"id":"W3083610101","doi":"10.1007/s40430-020-02584-z","title":"Synthesis of TiN and TiO2 thin films by cathodic cage plasma deposition: a brief review","year":2020,"lang":"en","type":"review","venue":"Journal of the Brazilian Society of Mechanical Sciences and Engineering","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":19,"is_retracted":false,"has_abstract":false,"ca_institutions":"Institut National de la Recherche Scientifique","funders":"","keywords":"Materials science; Titanium nitride; Deposition (geology); Titanium; Cathodic protection; Tin; Thin film; Nitriding; Nitride; Plasma; Physical vapor deposition; Nanotechnology; Metallurgy; Anode; Layer (electronics); Electrode; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001280152,0.000281824,0.001433127,0.0000332278,0.00007843664,0.00003154002,0.0005387228,0.0001925626,0.00001903112],"category_scores_gemma":[0.0002037583,0.0001785164,0.0007021061,0.0004493149,0.00008900898,0.0001271031,0.0001442259,0.000527206,5.050414e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003075857,"about_ca_system_score_gemma":0.00006184862,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00000417733,"about_ca_topic_score_gemma":3.392505e-7,"domain_scores_codex":[0.9981663,0.00006487092,0.000918953,0.0001822297,0.0004605756,0.0002071124],"domain_scores_gemma":[0.9989644,0.0002197924,0.0004641088,0.0001452354,0.00003763557,0.0001688869],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.000006030806,0.00006651214,8.591576e-7,0.2004603,0.0008252622,0.00001219591,0.0003394393,0.0004803575,0.006497089,0.001819214,0.03710573,0.752387],"study_design_scores_gemma":[0.0002965264,0.0002969815,0.00000150603,0.1238731,0.002236132,0.001014095,0.000121208,0.08060308,0.005086567,0.0001955803,0.7855024,0.0007728733],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"review","genre_gemma":"review","genre_scores_codex":[0.00008043936,0.9971482,0.00182447,0.0002103124,0.000456389,0.000185344,0.0000426956,0.00001692234,0.00003521944],"genre_scores_gemma":[0.0003098344,0.9912843,0.008251557,0.00004483914,0.00006074952,0.000004273926,7.316057e-7,0.00002323229,0.00002044621],"genre_candidate":"review","genre_consensus":"review","teacher_disagreement_score":0.7516142,"threshold_uncertainty_score":0.7279687,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01761456641652109,"score_gpt":0.2403869848546531,"score_spread":0.222772418438132,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}