{"id":"W3085189930","doi":"","title":"Plasma Etching for High Efficiency Solar Cells Fabrication","year":2016,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Silicon and Solar Cell Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Fabrication; Etching (microfabrication); Plasma; Materials science; Optoelectronics; Plasma etching; Nanotechnology; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002355132,0.0002708939,0.0003290887,0.0001768348,0.0003148819,0.0006998422,0.0003726343,0.0006053725,0.004857816],"category_scores_gemma":[0.0002910072,0.0003612254,0.0002420352,0.0002476157,0.0001795608,0.0005751675,0.0004372492,0.0005585874,0.001758257],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003536344,"about_ca_system_score_gemma":0.0002401395,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00032341,"about_ca_topic_score_gemma":0.0006291338,"domain_scores_codex":[0.9997886,0.00001101999,0.000009074551,0.00004072855,0.0001297825,0.00002081693],"domain_scores_gemma":[0.9998816,0.00003193293,0.00001297298,0.0000286156,0.0000397742,0.000005050915],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005453905,0.00002742234,0.0002100925,0.0002431391,0.00002047568,0.00009391332,0.0001055167,0.001420293,0.9687081,0.002437812,0.001983272,0.02469555],"study_design_scores_gemma":[0.00002253264,0.0001178631,0.001639565,0.00001756674,0.00001674212,0.0003302642,0.00006561811,0.009161185,0.956601,0.001578741,0.0304364,0.00001250465],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6855248,0.009263317,0.1981205,0.001699181,0.001429055,0.0003239207,0.001514305,0.002262383,0.09986255],"genre_scores_gemma":[0.8643344,0.003110144,0.09437972,0.0001743196,0.0001628409,0.00008345438,0.0005867163,0.0003519608,0.03681653],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.004857816,"threshold_uncertainty_score":0.01625097,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01070857566767447,"score_gpt":0.2045479143311525,"score_spread":0.193839338663478,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}