{"id":"W3087764137","doi":"10.1149/09807.0117ecst","title":"Influence of Glass Surface Modification on Thin Film Copper Electrodes","year":2020,"lang":"en","type":"article","venue":"ECS Transactions","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Research & Development Corporation","funders":"","keywords":"Materials science; Copper; Composite material; Microstructure; Transmission electron microscopy; Sheet resistance; Surface modification; Electrode; Hydrofluoric acid; Scanning electron microscope; Microfabrication; Layer (electronics); Metallurgy; Nanotechnology; Chemical engineering; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009975665,0.0003457628,0.0002135004,0.0001329074,0.0001787772,0.0003315178,0.0001952159,0.0002547969,0.001160817],"category_scores_gemma":[0.0002589999,0.0001840792,0.0002226999,0.0001456631,0.0001974117,0.0001602907,0.0001686421,0.000261157,0.0002143379],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001734108,"about_ca_system_score_gemma":0.0001501065,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001641774,"about_ca_topic_score_gemma":0.001917829,"domain_scores_codex":[0.9998529,0.00001764449,0.00001177716,0.00003515307,0.00003853805,0.00004401906],"domain_scores_gemma":[0.9998535,0.0000468823,0.00004156132,0.00002149779,0.00002496615,0.00001155182],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008204816,0.000009040395,0.0001945006,0.00004102136,0.00001281843,0.00007689467,0.00002772451,0.0001259395,0.9984629,0.00002070561,0.00001684368,0.0009295174],"study_design_scores_gemma":[0.000003737173,0.0002086169,0.00185505,0.000002897632,0.00001726644,0.00004468702,0.00002926909,0.0003308323,0.9970973,0.000007593509,0.0003994814,0.00000334793],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9976372,0.0007608595,0.0005602989,0.00003565009,0.00002781186,0.00001542368,0.0000806706,0.0000249312,0.0008570954],"genre_scores_gemma":[0.9978088,0.0005831826,0.0008061138,0.0000264452,0.000009972868,0.00001159906,0.00009204962,0.00001524962,0.0006466043],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001641774,"threshold_uncertainty_score":0.003883362,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02198089055921343,"score_gpt":0.2591528950963866,"score_spread":0.2371720045371731,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}