{"id":"W3087981171","doi":"10.1109/icton51198.2020.9203335","title":"Low Temperature SiN Waveguides Optimization for Photonic Platform","year":2020,"lang":"en","type":"preprint","venue":"","topic":"Advanced Fiber Laser Technologies","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Sherbrooke","funders":"","keywords":"Photonics; Plasma-enhanced chemical vapor deposition; Fan-out; Materials science; Refractive index; Optoelectronics; Electronic engineering; Computer science; Chemical vapor deposition; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001735971,0.0007055317,0.0002309608,0.0003069668,0.0003045967,0.0006031449,0.0003285501,0.0003527973,0.001856725],"category_scores_gemma":[0.0002433138,0.0002560152,0.0002035465,0.0003558119,0.0002298781,0.0004148797,0.0002473925,0.0003776707,0.0006405397],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0007404083,"about_ca_system_score_gemma":0.0005867953,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006617577,"about_ca_topic_score_gemma":0.00210168,"domain_scores_codex":[0.9998696,0.000008655431,0.000004717176,0.00003251553,0.00006236404,0.00002215224],"domain_scores_gemma":[0.9998171,0.00002755636,0.00007190952,0.00001821364,0.00005356582,0.00001182843],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007313074,0.00004899779,0.0006391325,0.0001756756,0.00001485189,0.00006813908,0.00004142362,0.02303848,0.9646082,0.00258173,0.0006696361,0.008040627],"study_design_scores_gemma":[0.00003009131,0.0002837728,0.001776987,0.00002547982,0.00003472325,0.00009276724,0.00006301988,0.09898385,0.8905445,0.0007298582,0.00741279,0.00002222192],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.881622,0.002509624,0.08686084,0.0003637629,0.0001700372,0.0001024951,0.0004713932,0.0005887102,0.02731107],"genre_scores_gemma":[0.945341,0.0008126046,0.04814137,0.00003555788,0.00002686014,0.00008843755,0.0003148124,0.0002033492,0.005036145],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001856725,"threshold_uncertainty_score":0.00621134,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01927541575780362,"score_gpt":0.2621932151432532,"score_spread":0.2429177993854496,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}