{"id":"W3088991518","doi":"10.1149/ma2020-02281933mtgabs","title":"Effect of Glass Substrate on the Film Properties of Poly Silicon by Excimer Laser Annealing","year":2020,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Research & Development Corporation","funders":"","keywords":"Materials science; Silicon; Composite material; Excimer laser; Amorphous solid; Residual stress; Amorphous silicon; Polycrystalline silicon; Thin film; Surface roughness; Nanocrystalline silicon; Thin-film transistor; Layer (electronics); Crystalline silicon; Optics; Optoelectronics; Laser; Crystallography; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009628963,0.0002633184,0.00021076,0.00008907787,0.0001525223,0.0003244718,0.0001321341,0.0001748742,0.001638167],"category_scores_gemma":[0.0002536478,0.0001869026,0.0001505232,0.0001296293,0.0001289078,0.0002067909,0.0001106569,0.0002305432,0.0002371785],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001951532,"about_ca_system_score_gemma":0.0001107847,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000962206,"about_ca_topic_score_gemma":0.001980572,"domain_scores_codex":[0.9998817,0.000009920223,0.000009466467,0.00003011462,0.00003507846,0.00003370694],"domain_scores_gemma":[0.9998166,0.00008224312,0.00004021346,0.00002197965,0.00002729998,0.00001177105],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005303343,0.000005671521,0.0002224673,0.00003028034,0.000006298983,0.00003628495,0.0000245104,0.0001165781,0.9986583,0.00001146579,0.00001694326,0.0008181778],"study_design_scores_gemma":[0.000003256259,0.0001070035,0.003912047,0.000002342905,0.00001044402,0.00003272239,0.00002016485,0.0005219607,0.9950551,0.000004314574,0.0003276848,0.000003027844],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9975593,0.0008214988,0.0006725191,0.00002880968,0.00001625908,0.00001013836,0.0001070948,0.00003602041,0.0007482693],"genre_scores_gemma":[0.9980166,0.0004261177,0.0006719694,0.00001645125,0.000004396787,0.000007753233,0.0001265664,0.0000318917,0.00069826],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001638167,"threshold_uncertainty_score":0.00548023,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01479046957266229,"score_gpt":0.1997945896158412,"score_spread":0.1850041200431789,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}