{"id":"W3092554298","doi":"10.1039/d0cc05781a","title":"A carbene stabilized precursor for the spatial atomic layer deposition of copper thin films","year":2020,"lang":"en","type":"article","venue":"Chemical Communications","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":17,"is_retracted":false,"has_abstract":true,"ca_institutions":"Canada Malting (Canada)","funders":"H2020 Marie Skłodowska-Curie Actions; Horizon 2020 Framework Programme; Deutsche Forschungsgemeinschaft; Science Foundation Ireland; European Commission","keywords":"Atomic layer deposition; Carbene; Copper; Thin film; Layer (electronics); Deposition (geology); Metal; Plasma; Materials science; Chemical engineering; Chemistry; Nanotechnology; Organic chemistry; Catalysis","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00005354273,0.00007449237,0.0001322538,0.000007708672,0.0000488372,0.0000181848,0.0004529905,0.00005344346,0.0000443439],"category_scores_gemma":[0.00007511572,0.00005779024,0.0000592224,0.00006129514,0.00006342789,0.00004548079,0.00009127442,0.00008890627,0.000006606036],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001519178,"about_ca_system_score_gemma":0.00001353874,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00005201531,"about_ca_topic_score_gemma":0.00001480226,"domain_scores_codex":[0.9995658,0.00002014437,0.0002002382,0.00007229955,0.00005496984,0.00008653137],"domain_scores_gemma":[0.9990294,0.0003528155,0.00003626716,0.0004961881,0.00004681534,0.00003851249],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000175091,0.00001400514,0.00002970198,0.00005894326,0.00002847809,1.236201e-8,0.0005622769,0.0001353705,0.9972551,0.0002639219,0.001493037,0.0001416396],"study_design_scores_gemma":[0.0002949416,0.00001110447,0.00005042824,0.00001593615,0.00004314858,5.37308e-7,0.0001191072,0.08145379,0.9152273,0.0001391249,0.002567621,0.00007694624],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9938651,0.002112242,0.001200078,0.001420294,0.00008360841,0.0003915865,0.0001330458,0.0001368345,0.0006572435],"genre_scores_gemma":[0.9957147,0.0001226095,0.003743822,0.0001498366,0.00004147703,0.0001213603,0.00008630142,0.00001784989,0.000002006292],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.08202779,"threshold_uncertainty_score":0.2356617,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.04924083265707985,"score_gpt":0.2704184871310024,"score_spread":0.2211776544739225,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}