{"id":"W3093254580","doi":"10.1364/cleopr.2020.c7e_2","title":"Fabrication of High-Q Photonic Crystal Cavities with a Bosch Etch Process","year":2020,"lang":"en","type":"article","venue":"","topic":"Photonic Crystals and Applications","field":"Physics and Astronomy","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"","keywords":"Photonic crystal; Wafer; Fabrication; Materials science; Silicon on insulator; Optoelectronics; Etching (microfabrication); Wafer bonding; Insulator (electricity); Silicon; Process (computing); Photonics; Photonic integrated circuit; Nanotechnology; Computer science","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005359167,0.0003393285,0.0003880326,0.0002322885,0.0004871199,0.0003876404,0.0003889224,0.000445256,0.0007648308],"category_scores_gemma":[0.00044946,0.0004194281,0.0001790826,0.0001945837,0.0005569994,0.0003360903,0.0003972086,0.0004224523,0.0003246085],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002913912,"about_ca_system_score_gemma":0.0006733314,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008926032,"about_ca_topic_score_gemma":0.001808098,"domain_scores_codex":[0.9998143,0.00001776933,0.000008364852,0.0000276557,0.0000951144,0.00003685776],"domain_scores_gemma":[0.9997116,0.00009690569,0.00004878784,0.00004892771,0.00006583974,0.000027999],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004641329,0.00002178588,0.0001857334,0.00003559384,0.000004713986,0.00005749287,0.00006907387,0.0002604872,0.9962873,0.0009433629,0.0001487878,0.001939211],"study_design_scores_gemma":[0.00007897685,0.0002176881,0.001345583,0.00000505001,0.000007481718,0.00009841368,0.00002341865,0.003293636,0.9926771,0.0002503303,0.001985969,0.00001648134],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9641105,0.0004357901,0.03037511,0.0001775231,0.00007887396,0.0001569479,0.0003000167,0.0002999564,0.004065221],"genre_scores_gemma":[0.9262056,0.0003231634,0.07072213,0.00003961412,0.00003088867,0.000121476,0.0001258327,0.00005489789,0.002376444],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008926032,"threshold_uncertainty_score":0.00283426,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00985103821599764,"score_gpt":0.2348678853235545,"score_spread":0.2250168471075568,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}