{"id":"W3093254580","doi":"10.1364/cleopr.2020.c7e_2","title":"Fabrication of High-Q Photonic Crystal Cavities with a Bosch Etch Process","year":2020,"lang":"en","type":"article","venue":"","topic":"Photonic Crystals and Applications","field":"Physics and Astronomy","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"","keywords":"Photonic crystal; Wafer; Fabrication; Materials science; Silicon on insulator; Optoelectronics; Etching (microfabrication); Wafer bonding; Insulator (electricity); Silicon; Process (computing); Photonics; Photonic integrated circuit; Nanotechnology; Computer science","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00002193983,0.00008859701,0.0001374925,0.00001337157,0.00004932416,0.00001796784,0.0001157516,0.00001426461,0.0007433623],"category_scores_gemma":[0.000001312244,0.00006946203,0.00003264369,0.0001976132,0.00004373178,0.00008320586,0.00002017956,0.00006471826,0.000009108785],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000006109404,"about_ca_system_score_gemma":0.00009375023,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004459266,"about_ca_topic_score_gemma":0.000006796726,"domain_scores_codex":[0.9994447,0.00000612048,0.0001451833,0.0001718637,0.0001148377,0.0001173218],"domain_scores_gemma":[0.9996022,0.00001491244,0.00008923615,0.0001375163,0.00009263423,0.00006352637],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"theoretical_or_conceptual","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002835839,0.001392666,0.04459226,0.0004625776,0.0005110676,0.000001532439,0.01093656,0.002292634,0.4124383,0.511609,0.005270118,0.01020971],"study_design_scores_gemma":[0.002619222,0.0005090719,0.008373204,0.00006768758,0.0001630019,0.000002116411,0.01488543,0.009158954,0.9335261,0.01638245,0.01346539,0.0008473611],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9608261,0.00001124952,0.02219575,0.0005904447,0.000006453301,0.0002574209,0.00006954889,0.00003716311,0.01600585],"genre_scores_gemma":[0.9989377,8.649614e-7,0.0005789828,0.00007052144,0.00005606244,0.0001103769,0.00004838548,0.00001112181,0.0001860158],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.5210878,"threshold_uncertainty_score":0.8139296,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00985103821599764,"score_gpt":0.2348678853235545,"score_spread":0.2250168471075568,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}