{"id":"W3097960484","doi":"10.1116/6.0000493","title":"Resolving self-limiting growth in silicon nitride plasma enhanced atomic layer deposition with tris-dimethylamino silane precursor","year":2020,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Atomic layer deposition; X-ray photoelectron spectroscopy; Silane; Chemical vapor deposition; Substrate (aquarium); Silicon; Materials science; Silicon nitride; Nitride; Plasma-enhanced chemical vapor deposition; Analytical Chemistry (journal); Ellipsometry; Thin film; Chemistry; Nanotechnology; Layer (electronics); Chemical engineering; Optoelectronics; Organic chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005810703,0.0002531371,0.0005038767,0.0006292816,0.0001469545,0.0001349863,0.0004561818,0.0002067918,0.00001547481],"category_scores_gemma":[0.00009371791,0.0001995764,0.00004457479,0.001388319,0.0002085976,0.0007876633,0.00008706894,0.0004968467,0.000004428868],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00006727556,"about_ca_system_score_gemma":0.00009474909,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001233817,"about_ca_topic_score_gemma":0.000009915182,"domain_scores_codex":[0.9982532,0.00003166389,0.0006037545,0.0003259489,0.0003099317,0.0004755199],"domain_scores_gemma":[0.999151,0.0001060577,0.0003056078,0.0001313084,0.0001547354,0.0001512723],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008430284,0.00002446533,0.009105678,0.00008186097,0.00002940067,0.00004603313,0.0008047285,0.0006623432,0.9887779,0.00005933523,0.00002224247,0.0003016805],"study_design_scores_gemma":[0.001004334,0.0005107944,0.00342263,0.0002024812,0.00003982949,0.0002257592,0.001239567,0.01833175,0.9745657,0.0001534722,0.00003244099,0.0002711788],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9970526,0.001607202,0.0001735582,0.0004905426,0.0002117279,0.000164659,0.000005628885,0.0002009626,0.00009309147],"genre_scores_gemma":[0.9921187,0.0005830469,0.007163997,0.00005379813,0.00004694473,0.000005535435,6.991385e-7,0.00002477918,0.00000256265],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0176694,"threshold_uncertainty_score":0.813849,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00952262146741097,"score_gpt":0.2125331724862832,"score_spread":0.2030105510188722,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}