{"id":"W3105693365","doi":"10.1088/1361-6641/abcbd3","title":"Selective GaN sublimation and local area regrowth for co-integration of enhancement mode and depletion mode Al(Ga)N/GaN high electron mobility transistors","year":2020,"lang":"en","type":"article","venue":"Semiconductor Science and Technology","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"Agence Nationale de la Recherche","keywords":"Materials science; Sublimation (psychology); Optoelectronics; Transistor; Barrier layer; Reactive-ion etching; Heterojunction; Layer (electronics); Etching (microfabrication); Nanotechnology; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001306075,0.0002337856,0.0002301852,0.000140712,0.0001300782,0.0003236971,0.0005129307,0.0001991415,0.0003631134],"category_scores_gemma":[0.0001704468,0.0001897219,0.0001750385,0.00007533932,0.0001888951,0.0002610708,0.0003072509,0.0002190292,0.0001344594],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000162279,"about_ca_system_score_gemma":0.0001512964,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002977849,"about_ca_topic_score_gemma":0.0007888948,"domain_scores_codex":[0.9998646,0.0000125743,0.000006343459,0.00004564425,0.00004144874,0.00002933161],"domain_scores_gemma":[0.9998664,0.00002344667,0.00004013493,0.00003076104,0.00002211367,0.00001702939],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001469809,0.00001010502,0.0001497355,0.00001395914,0.000003797932,0.00003444511,0.00001554576,0.00009517669,0.9985911,0.00006442317,0.00001884719,0.0009881804],"study_design_scores_gemma":[0.000006540105,0.0001408399,0.001460613,0.000001471613,0.000008884021,0.0001365335,0.00001176665,0.001776105,0.9958467,0.00002017809,0.0005864369,0.000003942891],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9923413,0.0004177805,0.006285902,0.00002653788,0.00002582891,0.00001856668,0.00003383084,0.00008687422,0.0007634291],"genre_scores_gemma":[0.9946796,0.00009216686,0.004317992,0.00001269772,0.000006733198,0.00001083293,0.00002650677,0.00002052774,0.0008328527],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0005129307,"threshold_uncertainty_score":0.001214743,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01453972056323447,"score_gpt":0.2684845465745181,"score_spread":0.2539448260112837,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}