{"id":"W3108640232","doi":"10.3762/bjnano.11.159","title":"Mapping of integrated PIN diodes with a 3D architecture by scanning microwave impedance microscopy and dynamic spectroscopy","year":2020,"lang":"en","type":"article","venue":"Beilstein Journal of Nanotechnology","topic":"Near-Field Optical Microscopy","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"Bruker (Canada)","funders":"European Regional Development Fund; Région Normandie","keywords":"Materials science; Optoelectronics; Diode; Microwave; Microelectronics; Capacitor; Conductive atomic force microscopy; Dielectric spectroscopy; Back end of line; Dielectric; Nanotechnology; Electrical engineering; Voltage; Computer science; Atomic force microscopy; Physics; Electrode","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0001205467,0.0002930438,0.0006543826,0.0002483492,0.00004296758,0.00003270754,0.000375575,0.0002868896,0.00001307635],"category_scores_gemma":[0.0001109832,0.0002461271,0.00007305991,0.0005375625,0.0003376311,0.0001007996,0.00007120636,0.001037692,0.000001995941],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000811264,"about_ca_system_score_gemma":0.00007142148,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00000569207,"about_ca_topic_score_gemma":0.000007623454,"domain_scores_codex":[0.9985847,0.00003499703,0.0005936031,0.000232494,0.0001500375,0.0004041837],"domain_scores_gemma":[0.9992396,0.0000830774,0.0002556556,0.0001910545,0.00009893848,0.0001316409],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001622999,0.00001745901,0.000425653,0.0001652453,0.0001202494,0.00005913445,0.0004512422,0.000430797,0.9906827,0.00003044474,0.0001639451,0.007290799],"study_design_scores_gemma":[0.00107641,0.0009033972,0.00005575022,0.0004433162,0.00003740006,0.000456789,0.0004142354,0.002889664,0.991949,0.0001897308,0.00133113,0.0002532009],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7585912,0.00475233,0.2351047,0.001212926,0.00007533928,0.0001246431,0.0000178877,0.00009025,0.00003069862],"genre_scores_gemma":[0.8667697,0.0003764755,0.1326535,0.0001159885,0.00002522767,0.00000242662,0.000002085377,0.00004849603,0.00000607201],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1081785,"threshold_uncertainty_score":0.9999991,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004083737607674168,"score_gpt":0.206992616420932,"score_spread":0.2029088788132578,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}