{"id":"W3111550718","doi":"10.1364/quantum.2020.qw6a.2","title":"Monolithically integrated membrane-in-the-middle cavity optomechanical systems","year":2020,"lang":"en","type":"article","venue":"OSA Quantum 2.0 Conference","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Surface micromachining; Materials science; Silicon nitride; Membrane; Optoelectronics; Silicon; Embedding; Resonance (particle physics); Fabry–Pérot interferometer; Chip; Microelectromechanical systems; Fabrication; Chemistry; Physics; Engineering; Computer science; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004696551,0.0002566245,0.0004192923,0.00002799582,0.00009085191,0.000173455,0.0007035271,0.0001237766,0.0007165521],"category_scores_gemma":[0.0001376667,0.0001710925,0.0001290728,0.0003909071,0.00007554871,0.00009897864,0.0001140919,0.0007857115,0.0003762211],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001855798,"about_ca_system_score_gemma":0.0001441815,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005364928,"about_ca_topic_score_gemma":0.000008544486,"domain_scores_codex":[0.9978253,0.0003477111,0.0004672221,0.0004804575,0.000406577,0.0004726789],"domain_scores_gemma":[0.9988133,0.0003169411,0.00009137322,0.0003192983,0.0001165664,0.0003425587],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"theoretical_or_conceptual","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00004323495,0.000130518,0.0003232783,0.00003482641,0.00001949888,0.00001937265,0.0004351661,0.00001217959,0.002659499,0.9935941,0.0001001271,0.0026282],"study_design_scores_gemma":[0.003590124,0.001030738,0.002045835,0.000598778,0.0001640113,0.00001380928,0.008006264,0.8495975,0.01270673,0.07525612,0.04478649,0.002203652],"study_design_candidate":"theoretical_or_conceptual","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9092719,0.00007401358,0.07008877,0.004806926,0.0003223209,0.0006967698,0.0001033649,0.0001226729,0.01451328],"genre_scores_gemma":[0.9989969,0.00000628908,0.0001318244,0.0005072784,0.0001744254,0.00006072038,0.00002822027,0.00001558248,0.00007873391],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.918338,"threshold_uncertainty_score":0.7845744,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.06720531622623964,"score_gpt":0.260539629995921,"score_spread":0.1933343137696813,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}