{"id":"W3111550718","doi":"10.1364/quantum.2020.qw6a.2","title":"Monolithically integrated membrane-in-the-middle cavity optomechanical systems","year":2020,"lang":"en","type":"article","venue":"OSA Quantum 2.0 Conference","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Surface micromachining; Materials science; Silicon nitride; Membrane; Optoelectronics; Silicon; Embedding; Resonance (particle physics); Fabry–Pérot interferometer; Chip; Microelectromechanical systems; Fabrication; Chemistry; Physics; Engineering; Computer science; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002822414,0.000314954,0.0003640981,0.0001276722,0.0003533204,0.0004684571,0.001173447,0.0008231312,0.00139533],"category_scores_gemma":[0.0002470406,0.0002977747,0.0002470688,0.0001323223,0.0002669684,0.0008625868,0.0007270617,0.0005156283,0.0006688607],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005513203,"about_ca_system_score_gemma":0.0003979017,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004533352,"about_ca_topic_score_gemma":0.001296339,"domain_scores_codex":[0.999749,0.00002191411,0.00001321784,0.00006257706,0.0001045472,0.00004880665],"domain_scores_gemma":[0.9998674,0.00002724303,0.00002616888,0.00002525797,0.00003066056,0.00002316151],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005025172,0.00003862252,0.0001252196,0.00004578243,0.00000909852,0.00004873779,0.00002598062,0.0008923195,0.9914625,0.002398265,0.0002542885,0.004648845],"study_design_scores_gemma":[0.00005575586,0.0003677878,0.0009650415,0.000009693637,0.00002662088,0.0001685008,0.00002715412,0.03256497,0.9536526,0.0008978301,0.01121894,0.00004508191],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7982751,0.002685668,0.1850073,0.0006667309,0.0006919769,0.0002281072,0.0005506879,0.00187925,0.0100151],"genre_scores_gemma":[0.8859827,0.0004546523,0.1093186,0.0001245353,0.00007016778,0.0001320891,0.0001404368,0.00004417242,0.00373278],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00139533,"threshold_uncertainty_score":0.004667878,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.06720531622623964,"score_gpt":0.260539629995921,"score_spread":0.1933343137696813,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}