{"id":"W3114038705","doi":"10.31399/asm.cp.istfa2002p0553","title":"Advanced sub 0.13µm Cu Devices – Failure Analysis and Circuit Edit With Improved FIB Chemical Processes and Beam Characteristics","year":2002,"lang":"en","type":"article","venue":"Proceedings - International Symposium for Testing and Failure Analysis","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"Fibics (Canada)","funders":"","keywords":"Etching (microfabrication); Materials science; Focused ion beam; Dielectric; Ion beam; Optoelectronics; Isotropic etching; Beam (structure); Nanotechnology; Ion; Optics; Chemistry; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002548725,0.0002993756,0.0002687441,0.0003260342,0.0002132105,0.0002846172,0.0005165231,0.0003341056,0.001668961],"category_scores_gemma":[0.0005089765,0.0001865732,0.0001264892,0.0002644483,0.0002079965,0.0004113235,0.0002730177,0.0002318309,0.0002946294],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003630249,"about_ca_system_score_gemma":0.0001484547,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009630196,"about_ca_topic_score_gemma":0.001837286,"domain_scores_codex":[0.9997794,0.00001643384,0.00001376529,0.00003840992,0.0001149211,0.00003718673],"domain_scores_gemma":[0.9995354,0.00009123605,0.00006482519,0.0001116928,0.0001780473,0.00001883545],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001411593,0.00003461301,0.000903901,0.00007244499,0.000009779485,0.0001568602,0.00008130392,0.001290812,0.9822994,0.0005539064,0.0006619106,0.01379394],"study_design_scores_gemma":[0.00004206561,0.0003952635,0.01052853,0.000008514923,0.00001986773,0.0005451475,0.00003414474,0.02004433,0.9609065,0.0002862151,0.007161412,0.00002809597],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9496188,0.0004961199,0.04447133,0.00007843374,0.00005700742,0.00007756647,0.0004706534,0.0008449769,0.003884991],"genre_scores_gemma":[0.8927409,0.0002250231,0.1017409,0.00003975884,0.00002035144,0.00009318248,0.0005427353,0.00008950202,0.004507545],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001668961,"threshold_uncertainty_score":0.005583227,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008604323796260489,"score_gpt":0.1916615396333342,"score_spread":0.1830572158370737,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}