{"id":"W3114173053","doi":"10.1364/ol.414860","title":"Dual-band fiber-chip grating coupler in a 300 mm silicon-on-insulator platform and 193 nm deep-UV lithography","year":2020,"lang":"en","type":"article","venue":"Optics Letters","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":17,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Research Council Canada; University of Ottawa","funders":"H2020 European Research Council; Agence Nationale de la Recherche; European Commission","keywords":"Materials science; Optics; Lithography; Electron-beam lithography; Silicon on insulator; Optoelectronics; Fiber Bragg grating; Grating; Photolithography; Chip; Immersion lithography; Diffraction grating; Silicon; Resist; Wavelength; Physics; Telecommunications; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001588751,0.0003114354,0.000253194,0.0001813837,0.0001471747,0.0002887796,0.0004843712,0.0002674538,0.002242697],"category_scores_gemma":[0.0001366891,0.0002530512,0.0002104688,0.0001652905,0.0001825535,0.0002634572,0.0002454591,0.0003942759,0.001841653],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000324793,"about_ca_system_score_gemma":0.0002995626,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007816863,"about_ca_topic_score_gemma":0.002233465,"domain_scores_codex":[0.9998786,0.000008426917,0.000009925889,0.00003818465,0.00004978104,0.0000149817],"domain_scores_gemma":[0.9998977,0.00002565621,0.00002877681,0.00002624963,0.0000101439,0.00001148793],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002058145,0.0000198771,0.000131903,0.00003877227,0.000003966983,0.00008433076,0.00002477046,0.0002931348,0.9953561,0.0004921328,0.0003186366,0.003215959],"study_design_scores_gemma":[0.00001057937,0.0001259469,0.001753021,0.000003998341,0.000006891904,0.0002115795,0.00001311448,0.00334183,0.9868363,0.00007895291,0.007607998,0.000009738032],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8957785,0.0005991047,0.08129898,0.0002028848,0.0001381491,0.0001242949,0.0016075,0.004570103,0.01568052],"genre_scores_gemma":[0.8248268,0.0003999753,0.1611864,0.00008310255,0.00002038391,0.0001409231,0.001163393,0.0004186259,0.01176041],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002242697,"threshold_uncertainty_score":0.007502556,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01128008634511586,"score_gpt":0.201019184264513,"score_spread":0.1897390979193972,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}