{"id":"W3114949270","doi":"10.3390/mi12010013","title":"Capacitive Based Micromachined Resonators for Low Level Mass Detection","year":2020,"lang":"en","type":"review","venue":"Micromachines","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Windsor","funders":"Natural Sciences and Engineering Research Council of Canada; University of Windsor; CMC Microsystems","keywords":"Capacitive sensing; Surface micromachining; Resonator; Microfabrication; Sensitivity (control systems); Electronic engineering; Microelectromechanical systems; Finite element method; Engineering; Computer science; Materials science; Electrical engineering; Optoelectronics; Fabrication; Structural engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0001934761,0.0008286453,0.001881927,0.0001519092,0.0002469012,0.0001049176,0.0005021559,0.0003074117,0.0003083777],"category_scores_gemma":[0.0001054984,0.0006316783,0.001488645,0.0003896456,0.000076186,0.0000634857,0.00008491133,0.0006723689,0.0001701054],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00009831359,"about_ca_system_score_gemma":0.0002335973,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00009406612,"about_ca_topic_score_gemma":0.000007180144,"domain_scores_codex":[0.9973914,0.0001882074,0.0007729746,0.0008790814,0.000216628,0.000551678],"domain_scores_gemma":[0.9981756,0.0006673888,0.0003766351,0.000352448,0.0000927491,0.0003351615],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.00003303803,0.00008289683,0.000003062359,0.003073192,0.0002467538,0.000004673759,0.00001260851,4.614395e-7,0.0003571461,0.002558375,0.0003046701,0.9933231],"study_design_scores_gemma":[0.0005715443,0.0001134679,0.000001395318,0.001668866,0.000617286,0.000001949314,0.000007856059,0.0006897975,0.001329689,0.003999163,0.9902672,0.0007318261],"study_design_candidate":"design_other","study_design_consensus":null,"genre_codex":"review","genre_gemma":"review","genre_scores_codex":[0.00006573449,0.8792094,0.1127919,0.00009069483,0.0005904282,0.001964768,0.004603634,0.000140763,0.0005426813],"genre_scores_gemma":[0.006048385,0.9125604,0.05123719,0.001020851,0.009213475,0.005107001,0.008661281,0.001722475,0.004428957],"genre_candidate":"review","genre_consensus":"review","teacher_disagreement_score":0.9925913,"threshold_uncertainty_score":0.9996135,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.04144540255330829,"score_gpt":0.3084851801342331,"score_spread":0.2670397775809248,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}