{"id":"W3123343129","doi":"10.1116/6.0000707","title":"Thermal ranges and figures of merit for gold-containing precursors for atomic layer deposition","year":2021,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University; University of Calgary","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Atomic layer deposition; Figure of merit; Thermal decomposition; Volatilisation; Chemical vapor deposition; Chemistry; Deposition (geology); Volatility (finance); Nanotechnology; Materials science; Layer (electronics); Organic chemistry; Optoelectronics; Mathematics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004853215,0.0001306477,0.0003534284,0.0002549733,0.000108216,0.00006719426,0.0001912498,0.0001402972,0.000009988881],"category_scores_gemma":[0.00006098046,0.0001055403,0.00005840111,0.0002727791,0.000232431,0.0003561765,0.00004605384,0.0001038072,1.364049e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001461722,"about_ca_system_score_gemma":0.00005935312,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000003628915,"about_ca_topic_score_gemma":0.000005216567,"domain_scores_codex":[0.9990981,0.00001023831,0.000354848,0.0001686898,0.0001192837,0.0002488731],"domain_scores_gemma":[0.9993221,0.0001047562,0.0001916938,0.0001052314,0.0002205791,0.0000556783],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005800991,0.00001327809,0.001675504,0.0001322918,0.000042394,0.000003092408,0.000292236,0.0002188477,0.9956552,0.0004450058,0.00005979965,0.001404383],"study_design_scores_gemma":[0.0007779482,0.0003733346,0.002023028,0.0001519379,0.00006390674,0.0001302727,0.001513884,0.006013805,0.9871891,0.001212541,0.0004023094,0.0001479285],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.986436,0.01224408,0.0004521747,0.0002625453,0.000373502,0.0001413785,0.0000291846,0.00003571982,0.0000254233],"genre_scores_gemma":[0.9886931,0.0008520849,0.01036507,0.00002022773,0.00003315832,0.00001012648,0.000001069867,0.00001339652,0.00001178086],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01139199,"threshold_uncertainty_score":0.4303809,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0135035281474426,"score_gpt":0.249029390982268,"score_spread":0.2355258628348254,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}