{"id":"W3123343129","doi":"10.1116/6.0000707","title":"Thermal ranges and figures of merit for gold-containing precursors for atomic layer deposition","year":2021,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University; University of Calgary","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Atomic layer deposition; Figure of merit; Thermal decomposition; Volatilisation; Chemical vapor deposition; Chemistry; Deposition (geology); Volatility (finance); Nanotechnology; Materials science; Layer (electronics); Organic chemistry; Optoelectronics; Mathematics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005547865,0.0004426955,0.0002723249,0.001926981,0.0002663885,0.0004590588,0.0004325185,0.0003516556,0.001933961],"category_scores_gemma":[0.001113624,0.0003318005,0.0003248816,0.0008200391,0.0001399217,0.0005129539,0.0002429556,0.0004413339,0.0007963444],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005462999,"about_ca_system_score_gemma":0.0001685029,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003335375,"about_ca_topic_score_gemma":0.0008910214,"domain_scores_codex":[0.9995137,0.00004760023,0.0000483217,0.00009845675,0.0002523646,0.00003946724],"domain_scores_gemma":[0.9994404,0.000230797,0.00009802859,0.00002677814,0.0001759974,0.00002806143],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001598433,0.00002959297,0.003702341,0.001086431,0.00003478355,0.0002931012,0.0001877575,0.001373469,0.9439746,0.001408836,0.0009900515,0.04675941],"study_design_scores_gemma":[0.000008306623,0.000759334,0.01352492,0.0001661124,0.00007456985,0.002010531,0.0001683313,0.003200622,0.9481332,0.0006096651,0.03130428,0.00004019819],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8375262,0.1016181,0.02395304,0.0003144422,0.0002030536,0.0001703007,0.001642033,0.0006825413,0.03389031],"genre_scores_gemma":[0.9360505,0.02121989,0.03671361,0.00008460318,0.00006637667,0.0001313938,0.001687877,0.0002061552,0.003839585],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001933961,"threshold_uncertainty_score":0.006469727,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0135035281474426,"score_gpt":0.249029390982268,"score_spread":0.2355258628348254,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}