{"id":"W3136601757","doi":"10.1116/6.0000914","title":"Hf1−xZrxO2 and HfO2/ZrO2 gate dielectrics with extremely low density of interfacial defects using low temperature atomic layer deposition on GaN and InP","year":2021,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":17,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada; Alberta Innovates - Technology Futures","keywords":"Materials science; Band gap; Optoelectronics; Dielectric; Band offset; Gate dielectric; Ellipsometry; Atomic layer deposition; Heterojunction; Annealing (glass); X-ray photoelectron spectroscopy; Analytical Chemistry (journal); Thin film; Transistor; Nanotechnology; Voltage; Chemistry; Valence band","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00005767519,0.0003134335,0.0001856126,0.0001248608,0.0001091896,0.0002533638,0.0003443683,0.0001247631,0.0002573169],"category_scores_gemma":[0.00008264322,0.0001973018,0.0001211382,0.0001430187,0.0001152925,0.0001794315,0.0001436546,0.0001728759,0.0000790559],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002884211,"about_ca_system_score_gemma":0.0001097449,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001716582,"about_ca_topic_score_gemma":0.003374726,"domain_scores_codex":[0.9999357,0.000004710313,0.000003400259,0.00001417533,0.00002292183,0.00001907371],"domain_scores_gemma":[0.9999515,0.000005260137,0.00001986966,0.000007159328,0.000007830864,0.000008365633],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002025242,0.000006443491,0.0001396152,0.00001757278,0.000004424768,0.0000418474,0.00001070157,0.0001711375,0.9990299,0.00004683488,0.00002011051,0.0004912787],"study_design_scores_gemma":[0.00001652706,0.0001362215,0.004187274,0.000003292512,0.00001751432,0.0001071006,0.00002261057,0.002973207,0.991811,0.00002504533,0.0006941169,0.00000607476],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9986346,0.0001337652,0.0006438099,0.00001736366,0.000005851003,0.000005817153,0.00007319144,0.00002818479,0.0004573362],"genre_scores_gemma":[0.9970492,0.0001912187,0.002097871,0.00001101371,0.000004194523,0.000009139837,0.00008268459,0.00001496539,0.0005397974],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001716582,"threshold_uncertainty_score":0.003413141,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008571048369608501,"score_gpt":0.2155265314956029,"score_spread":0.2069554831259944,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}