{"id":"W3137341567","doi":"10.1116/6.0000795","title":"(tBuN)SiMe2NMe2—A new <i>N,N</i>′-<i>κ</i>2-monoanionic ligand for atomic layer deposition precursors","year":2021,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"Saint Mary's University; Carleton University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Thermogravimetric analysis; Atomic layer deposition; Ligand (biochemistry); Chemistry; Deposition (geology); Layer (electronics); Crystallography; Inorganic chemistry; Organic chemistry; Receptor","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001183399,0.0003962751,0.0001769505,0.0001819028,0.0001582283,0.0002322249,0.0004188879,0.0002407239,0.001832551],"category_scores_gemma":[0.00009956231,0.0001915765,0.0001046337,0.0001222104,0.0001106958,0.000226419,0.0002360264,0.0002774738,0.0006893914],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002909692,"about_ca_system_score_gemma":0.0001441071,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004961371,"about_ca_topic_score_gemma":0.001519066,"domain_scores_codex":[0.9999044,0.000014173,0.000007675313,0.00002412643,0.00003223969,0.00001744377],"domain_scores_gemma":[0.9999424,0.000006001765,0.00001193752,0.000008013438,0.00001698902,0.00001462031],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004546599,0.000007367169,0.00007659128,0.00008346253,0.000002995808,0.00004272666,0.00001774605,0.00006560815,0.9978248,0.0002810365,0.0001836092,0.001368621],"study_design_scores_gemma":[0.00001709445,0.00009492756,0.0003539904,0.000005935191,0.000004739751,0.0002702079,0.00001823362,0.0006000212,0.9884791,0.0000287715,0.01012051,0.000006567715],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9550502,0.001943557,0.02763302,0.0002122038,0.0001432019,0.0001633748,0.0008834134,0.0006472526,0.01332372],"genre_scores_gemma":[0.9564668,0.000803541,0.03305918,0.0001405216,0.00002353902,0.0001432299,0.0009012618,0.0001485293,0.008313394],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001832551,"threshold_uncertainty_score":0.006130457,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0111676175500125,"score_gpt":0.2384990470252254,"score_spread":0.2273314294752129,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}