{"id":"W3137573917","doi":"10.1109/mems51782.2021.9375343","title":"High Torque Electrostatic Micromotor Fabricated using Polymumps for Optical Scanning Applications","year":2021,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université du Québec à Montréal; École de Technologie Supérieure","funders":"","keywords":"Torque; Rotor (electric); Capacitance; Process (computing); Materials science; RADIUS; Mechanical engineering; Engineering; Computer science; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001730743,0.0003172286,0.0002239702,0.0001801539,0.0001692843,0.0002493628,0.0003113176,0.000337184,0.0006800049],"category_scores_gemma":[0.0002900416,0.0002383278,0.0001486138,0.0001357782,0.0001909602,0.0003155984,0.0002167103,0.000335574,0.000377666],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001953101,"about_ca_system_score_gemma":0.0002230141,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004352232,"about_ca_topic_score_gemma":0.001132797,"domain_scores_codex":[0.9998691,0.000007414083,0.000009461329,0.00002891579,0.00006646806,0.00001858238],"domain_scores_gemma":[0.9998073,0.00003927208,0.0000648623,0.00001974715,0.0000463764,0.00002252792],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001673495,0.000007563592,0.0001802856,0.00003902361,0.000002124472,0.00005649021,0.00001320827,0.0001508817,0.9957153,0.0001590719,0.0001191938,0.00354005],"study_design_scores_gemma":[0.00001241644,0.0002274186,0.001742959,0.000005017241,0.000005110185,0.0002816372,0.00001498434,0.00327264,0.9905433,0.00005051259,0.003835372,0.000008741941],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9173781,0.001274095,0.07591002,0.0002665332,0.0001483625,0.0001084644,0.000235698,0.0003597466,0.004318901],"genre_scores_gemma":[0.8743517,0.0004294271,0.1224666,0.00004645967,0.00001681538,0.00004746527,0.000165327,0.00005269251,0.002423555],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0006800049,"threshold_uncertainty_score":0.002274811,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01171601556514947,"score_gpt":0.2477174636971898,"score_spread":0.2360014481320403,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}