{"id":"W3143886613","doi":"10.1109/camp.2007.4350355","title":"MEMS-Based Electrostatic Actuated Scanner Dedicated for Ultrasound Sensors","year":2006,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Polytechnique Montréal","funders":"Natural Sciences and Engineering Research Council of Canada; Canada Research Chairs; CMC Microsystems","keywords":"Scanner; Microelectromechanical systems; Transducer; Wafer; Fabrication; Voltage; Rotation (mathematics); Finite element method; Software; Electronic engineering; Materials science; Engineering; Computer science; Acoustics; Electrical engineering; Optoelectronics; Physics; Structural engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001975505,0.000208581,0.0003021309,0.0001576888,0.0001203493,0.0002185444,0.0005475604,0.0005012588,0.001075731],"category_scores_gemma":[0.0005065686,0.0003115729,0.0002019374,0.0001299066,0.0002502894,0.0003731724,0.0002865665,0.0002491565,0.000491477],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001854056,"about_ca_system_score_gemma":0.0001774931,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001452312,"about_ca_topic_score_gemma":0.0004113539,"domain_scores_codex":[0.9997318,0.00002860995,0.00001460795,0.00004399035,0.0001610886,0.00001973118],"domain_scores_gemma":[0.9997106,0.00009447527,0.00007485072,0.00004691772,0.00005604606,0.00001710606],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003123968,0.000007069227,0.0001220124,0.00005051409,0.000005909411,0.00008097255,0.00001889292,0.0009434026,0.9907457,0.0004766809,0.0002044335,0.007313106],"study_design_scores_gemma":[0.00003273862,0.0003647879,0.002942926,0.00001251182,0.00002852285,0.001220296,0.00002375742,0.03161813,0.950267,0.0002621239,0.01318686,0.00004033483],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6611182,0.003381071,0.3217553,0.0004382227,0.0003683247,0.0002333784,0.0003955661,0.001914566,0.01039544],"genre_scores_gemma":[0.7456089,0.0006654884,0.2455846,0.0001627181,0.00007229493,0.0001217504,0.0001758618,0.00008081783,0.007527596],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001075731,"threshold_uncertainty_score":0.00359875,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005125021062533579,"score_gpt":0.2095960469515936,"score_spread":0.20447102588906,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}