{"id":"W3149289705","doi":"","title":"MEMS-Based Electrostatic Actuated Scanner Dedicated for Ultrasound Sensors","year":2007,"lang":"en","type":"article","venue":"International Workshop on Computer Architecture for Machine Perception","topic":"Electrowetting and Microfluidic Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Polytechnique Montréal","funders":"","keywords":"Scanner; Microelectromechanical systems; Wafer; Transducer; Fabrication; Voltage; Rotation (mathematics); Finite element method; Materials science; Software; Electronic engineering; Computer science; Engineering; Acoustics; Electrical engineering; Optoelectronics; Physics; Structural engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002001812,0.0002246287,0.0003145879,0.000173107,0.000125545,0.0002440096,0.0006186653,0.0005624887,0.001099422],"category_scores_gemma":[0.0004617903,0.0003418872,0.0002356242,0.0001429742,0.0002537961,0.0004002656,0.0003094244,0.0002726424,0.0005215508],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002056077,"about_ca_system_score_gemma":0.0001795692,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001511108,"about_ca_topic_score_gemma":0.0004072352,"domain_scores_codex":[0.9997002,0.00003009612,0.00001595052,0.00005203626,0.0001790618,0.0000226431],"domain_scores_gemma":[0.9997188,0.00008646169,0.00007694228,0.00004482366,0.00005500023,0.00001785797],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002834264,0.000008166006,0.0001179656,0.00005750439,0.000006820975,0.00008267691,0.00002095092,0.001017605,0.989871,0.0005704914,0.0002347463,0.007983686],"study_design_scores_gemma":[0.00003042506,0.0003923522,0.002882945,0.0000136868,0.00002887242,0.001133289,0.0000238656,0.03294312,0.9469903,0.0002792723,0.01523612,0.00004567455],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6213652,0.004173846,0.3588597,0.0004933363,0.0004850053,0.0002661276,0.0004192347,0.002137071,0.01180057],"genre_scores_gemma":[0.7355087,0.0007670653,0.2547427,0.0001803169,0.00008509329,0.0001426494,0.0001868374,0.00008203047,0.008304478],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001099422,"threshold_uncertainty_score":0.003677905,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007808996806998584,"score_gpt":0.2583057472963357,"score_spread":0.2504967504893371,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}