{"id":"W3149977808","doi":"10.1109/date.2012.6176728","title":"AIR (Aerial Image Retargeting): A novel technique for in-fab automatic model-based retargeting-for-yield","year":2012,"lang":"en","type":"article","venue":"","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Retargeting; Lithography; Process window; Aerial image; Computer science; Wafer; Process (computing); Reliability (semiconductor); Optical proximity correction; Matching (statistics); Artificial intelligence; Electronic engineering; Image (mathematics); Materials science; Engineering; Nanotechnology; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0008729741,0.0003622227,0.0003992291,0.0003111354,0.00007733655,0.00002135297,0.0002962397,0.0002372118,0.00004546124],"category_scores_gemma":[0.0002139279,0.000370041,0.0002075872,0.0002829469,0.00006059689,0.0003972212,0.00004152703,0.0002214549,0.000002026002],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001433984,"about_ca_system_score_gemma":0.00002955122,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000008069293,"about_ca_topic_score_gemma":0.000005164144,"domain_scores_codex":[0.9980708,0.00001391055,0.0006065725,0.0002966593,0.0001782665,0.0008337998],"domain_scores_gemma":[0.999018,0.0002388635,0.00009390756,0.0004495028,0.00008157075,0.0001182073],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001036039,0.000308004,0.0008696008,0.001472225,0.00006215296,9.06476e-7,0.0002232047,0.01250042,0.973426,0.005110221,0.00495785,0.0009658532],"study_design_scores_gemma":[0.000626984,0.00006643708,0.00005159472,0.0001431954,0.00002285742,0.000001915756,0.0000176006,0.3695417,0.6254838,0.002118525,0.001476754,0.0004486535],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"methods","genre_scores_codex":[0.006663215,0.0001046427,0.9840881,0.00004274388,0.0002840863,0.002950721,0.00008688644,0.001981566,0.003798016],"genre_scores_gemma":[0.410385,0.000004563105,0.5866656,0.0001023313,0.00009366766,0.00260313,0.00002857311,0.00008829468,0.00002886507],"genre_candidate":"methods","genre_consensus":"methods","teacher_disagreement_score":0.4037217,"threshold_uncertainty_score":0.9998751,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01702931870596228,"score_gpt":0.2686510903327316,"score_spread":0.2516217716267693,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}