{"id":"W3158811534","doi":"10.1039/d1na00171j","title":"Recent progress on kinetic control of chemical vapor deposition growth of high-quality wafer-scale transition metal dichalcogenides","year":2021,"lang":"en","type":"review","venue":"Nanoscale Advances","topic":"2D Materials and Applications","field":"Materials Science","cited_by":36,"is_retracted":false,"has_abstract":true,"ca_institutions":"Kingswood University","funders":"Shenzhen Municipal Science and Technology Innovation Council; National Natural Science Foundation of China","keywords":"Nucleation; Chemical vapor deposition; Wafer; Materials science; Nanotechnology; Transition metal; Deposition (geology); Scale (ratio); Kinetic energy; Chemical engineering; Chemistry; Catalysis; Physics; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0003567963,0.0003680935,0.002015669,0.0000757258,0.00005502313,0.0000282842,0.0003131732,0.0002526543,0.000178689],"category_scores_gemma":[0.00005743923,0.0002900655,0.0003727399,0.0002966381,0.0003015877,0.000140666,0.00004050871,0.0001187764,0.00001682008],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005885594,"about_ca_system_score_gemma":0.0001005866,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002460762,"about_ca_topic_score_gemma":0.00000477236,"domain_scores_codex":[0.9969671,0.0003830178,0.001276089,0.0006077939,0.0004893873,0.0002766316],"domain_scores_gemma":[0.9980125,0.0002316873,0.0009687601,0.0004121834,0.0002872536,0.00008757296],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00009306132,0.0007966329,0.000001227881,0.01223872,0.00006691921,0.000003995763,0.00003732396,0.000005156601,0.5090038,0.002336694,0.00001611312,0.4754003],"study_design_scores_gemma":[0.0005316295,0.0001942714,0.000007017847,0.004710182,0.0008648331,0.00001728462,0.000009828143,0.000001657047,0.9497501,0.0005636405,0.04297866,0.0003709626],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"review","genre_gemma":"review","genre_scores_codex":[0.02030386,0.9756505,0.001050182,0.00008141569,0.0003820973,0.001043639,0.001381792,0.00005066794,0.00005583728],"genre_scores_gemma":[0.09988424,0.8967177,0.002203126,0.00002076812,0.0001575797,0.0005348647,0.0004379387,0.00003689721,0.000006854877],"genre_candidate":"review","genre_consensus":"review","teacher_disagreement_score":0.4750294,"threshold_uncertainty_score":0.9999552,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02476938740315589,"score_gpt":0.3251308971846443,"score_spread":0.3003615097814884,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}