{"id":"W3163941397","doi":"","title":"Patterning Platinum using CMP and plasma etching industrially compatible processes","year":2019,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Platinum; Etching (microfabrication); Plasma; Plasma etching; Materials science; Reactive-ion etching; Nanotechnology; Computer science; Chemistry; Catalysis; Physics; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002426292,0.0003587349,0.0003219165,0.0002567346,0.0003280856,0.0006522058,0.0005984925,0.0007074141,0.00332772],"category_scores_gemma":[0.0008551898,0.0002585267,0.0002349939,0.0004083322,0.0002388246,0.000512818,0.0005000596,0.0005326926,0.001323003],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003730941,"about_ca_system_score_gemma":0.0002371627,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002918071,"about_ca_topic_score_gemma":0.000525775,"domain_scores_codex":[0.9995804,0.00002750086,0.00002658443,0.0001372111,0.0001774239,0.00005081385],"domain_scores_gemma":[0.9997389,0.00005418623,0.00004905833,0.00008547272,0.00005741646,0.00001492536],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004717493,0.00001115486,0.0001631615,0.0001045729,0.000003722291,0.0001545557,0.00004421311,0.0001751313,0.9905767,0.0008413507,0.0003611149,0.007517085],"study_design_scores_gemma":[0.00001131293,0.0001091039,0.001532383,0.000006115558,0.000006390642,0.0005090514,0.00003422278,0.001498762,0.985957,0.0003600119,0.009969465,0.000006234845],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8314321,0.003388394,0.1012062,0.0009533832,0.000920705,0.0003453419,0.000869568,0.001083839,0.05980054],"genre_scores_gemma":[0.9125856,0.001065072,0.06535046,0.0001505305,0.00007522029,0.0001043302,0.0005404263,0.0002299523,0.01989847],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00332772,"threshold_uncertainty_score":0.01113236,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03068897387746346,"score_gpt":0.253146134811115,"score_spread":0.2224571609336515,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}