{"id":"W3165038958","doi":"10.1017/s1551929521000663","title":"Radiation Damage and Nanofabrication in TEM and STEM","year":2021,"lang":"en","type":"article","venue":"Microscopy Today","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":46,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Nanolithography; Radiation damage; Materials science; Nanotechnology; Radiation; Physics; Medicine; Optics; Pathology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001499959,0.0009197175,0.0008600246,0.002334646,0.0006841072,0.001142219,0.001313833,0.001373934,0.002641181],"category_scores_gemma":[0.001346294,0.0007710955,0.0006596146,0.001809685,0.001120153,0.001985839,0.000756354,0.001267729,0.001391336],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006845741,"about_ca_system_score_gemma":0.0003324194,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007863456,"about_ca_topic_score_gemma":0.001144434,"domain_scores_codex":[0.9988493,0.0003355684,0.0001426719,0.0001767546,0.0004181957,0.00007758632],"domain_scores_gemma":[0.9991153,0.0005662424,0.0001088792,0.00008580706,0.00009374296,0.00003011465],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"not_applicable","study_design_scores_codex":[0.0006799736,0.0004002915,0.003003306,0.01414789,0.00017679,0.002328834,0.001145119,0.008090256,0.5365452,0.03533597,0.006635487,0.3915108],"study_design_scores_gemma":[0.00004827959,0.003970095,0.03796923,0.002267671,0.0002109838,0.02030819,0.0009638356,0.007365892,0.4166242,0.03544148,0.4743609,0.0004693097],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"review","genre_gemma":"methods","genre_scores_codex":[0.08451549,0.6442451,0.228083,0.00187973,0.003435767,0.0005221643,0.001517376,0.001219763,0.03458152],"genre_scores_gemma":[0.1751624,0.4817358,0.2961267,0.001918929,0.002757118,0.001159816,0.002676089,0.0006736244,0.03778959],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.002641181,"threshold_uncertainty_score":0.008835614,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005664570728895367,"score_gpt":0.2079124983330607,"score_spread":0.2022479276041653,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}