{"id":"W3172258546","doi":"10.3390/s21113858","title":"A MEMS Ultra-Wideband (UWB) Power Sensor with a Fe-Co-B Core Planar Inductor and a Vibrating Diaphragm Capacitor","year":2021,"lang":"en","type":"article","venue":"Sensors","topic":"Acoustic Wave Resonator Technologies","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Windsor","funders":"Natural Sciences and Engineering Research Council of Canada; Canadian Network for Research and Innovation in Machining Technology, Natural Sciences and Engineering Research Council of Canada; CMC Microsystems","keywords":"Capacitance; Capacitor; Microfabrication; Microelectromechanical systems; Variable capacitor; Materials science; Electrical engineering; Inductor; Planar; Diaphragm (acoustics); Voltage; Wideband; Amplifier; Optoelectronics; Electronic engineering; Engineering; CMOS; Fabrication; Computer science; Physics; Electrode","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.00006423372,0.0003021886,0.0003374776,0.0001160457,0.00009692895,0.00007076814,0.0001028051,0.0002285891,0.0000408721],"category_scores_gemma":[0.0002628067,0.0002589069,0.00004420153,0.0002873256,0.0001777726,0.0000883459,0.00001652027,0.0004065871,0.00001723051],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00006887628,"about_ca_system_score_gemma":0.00003431944,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001729554,"about_ca_topic_score_gemma":0.00002692662,"domain_scores_codex":[0.9987223,0.00001913744,0.0002185648,0.0003495352,0.0002533383,0.0004370901],"domain_scores_gemma":[0.9992154,0.0002059686,0.00004603233,0.0003501413,0.0000614817,0.0001209999],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003371862,0.00003252739,0.005702032,0.0002300913,0.000293287,0.001428494,0.002709696,0.00222726,0.9839138,0.0003226755,0.001964311,0.001142085],"study_design_scores_gemma":[0.002285505,0.0002999074,0.006170859,0.0005827079,0.000176324,0.002654207,0.02971235,0.01129637,0.9359588,0.0005191148,0.008161457,0.002182425],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9958267,0.0005815856,0.0004511554,0.0001216263,0.0001530517,0.0001751941,0.00008414457,0.0008132037,0.001793398],"genre_scores_gemma":[0.9964611,0.00007151148,0.003037773,0.00004699826,0.0000854733,0.00001262627,0.00001086621,0.00008154961,0.0001921127],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.04795504,"threshold_uncertainty_score":0.9999863,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01191008994921281,"score_gpt":0.2084123556432907,"score_spread":0.1965022656940779,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}