{"id":"W3173361515","doi":"10.82308/52339","title":"Fabrication of diffractive optical elements by electron beam lithography","year":2011,"lang":"en","type":"article","venue":"eScholarship@McGill (McGill)","topic":"Advanced optical system design","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"McGill University","keywords":"Fabrication; Lithography; Electron-beam lithography; Optics; Materials science; X-ray lithography; Cathode ray; Stencil lithography; Next-generation lithography; Beam (structure); Optoelectronics; Physics; Resist; Electron; Nanotechnology","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0004007275,0.0003990084,0.0004595167,0.0001975274,0.0001796968,0.00001522739,0.000411118,0.0002550918,0.000139725],"category_scores_gemma":[0.0002608395,0.0004202419,0.0001825127,0.0006174971,0.00008352663,0.0007300987,0.00007272297,0.0005802294,0.0001712969],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003569334,"about_ca_system_score_gemma":0.000006236424,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002307831,"about_ca_topic_score_gemma":0.000004719794,"domain_scores_codex":[0.9974644,0.0001057074,0.0007587263,0.000497121,0.0004821683,0.0006919443],"domain_scores_gemma":[0.9986145,0.0001659226,0.0001769375,0.0005414773,0.0002029144,0.0002981708],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000131014,0.0004952707,0.0006753262,0.0001680841,0.0003750843,0.00001084526,0.0000103285,0.0002209542,0.8401584,0.08292502,0.0000162564,0.07481341],"study_design_scores_gemma":[0.0007332352,0.0003468069,0.003339101,0.00007436695,0.0001003163,0.000009607678,0.00003585676,0.0002253002,0.9684842,0.01653203,0.009464876,0.0006543499],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9044876,0.0002967505,0.0007594521,0.000002928735,0.000259374,0.0007217294,0.0002896672,0.0005541437,0.09262837],"genre_scores_gemma":[0.9904007,0.00008706272,0.009083591,0.00003147083,0.00001760122,0.0001178951,0.00003396782,0.0001146346,0.0001130836],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1283257,"threshold_uncertainty_score":0.9998249,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01326459229706685,"score_gpt":0.2116237001248299,"score_spread":0.1983591078277631,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}