{"id":"W3177189934","doi":"10.1364/ome.426775","title":"Post-fabrication resonance trimming of Si<sub>3</sub>N<sub>4</sub> photonic circuits via localized thermal annealing of a sputter-deposited SiO<sub>2</sub> cladding","year":2021,"lang":"en","type":"article","venue":"Optical Materials Express","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Annealing (glass); Trimming; Cladding (metalworking); Sputtering; Fabrication; Optoelectronics; Resonance (particle physics); Thermal stability; Resonator; Sputter deposition; Optics; Thin film; Nanotechnology; Composite material","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001103696,0.0002989022,0.0001951772,0.0001571612,0.000193532,0.0002087099,0.0005526833,0.0002854736,0.001008461],"category_scores_gemma":[0.0003087758,0.000217721,0.0001891674,0.0001087925,0.0002826532,0.0002443546,0.0002059414,0.000346763,0.0003000117],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003692413,"about_ca_system_score_gemma":0.0002211969,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007369453,"about_ca_topic_score_gemma":0.002054214,"domain_scores_codex":[0.9998703,0.000006606227,0.000006353473,0.00005120657,0.00004273107,0.00002275145],"domain_scores_gemma":[0.9997324,0.00005433812,0.00009393478,0.00006418784,0.00004084029,0.00001428569],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001950056,0.000006426874,0.0001103675,0.00002272321,0.000004588128,0.00003573073,0.00002091765,0.0002011765,0.9972397,0.00004609199,0.00004921125,0.002243489],"study_design_scores_gemma":[0.000002738856,0.00008986963,0.001670412,0.000001402311,0.000007509136,0.00008720288,0.00001134562,0.001324917,0.9960175,0.0000183368,0.000764938,0.000003887546],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.977249,0.0003639913,0.01998421,0.0000536729,0.00006472163,0.00002523802,0.0001080724,0.000416031,0.001734984],"genre_scores_gemma":[0.9728295,0.0001345087,0.02439031,0.00003774417,0.00001596067,0.00002681726,0.0001067331,0.00006065666,0.002397658],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001008461,"threshold_uncertainty_score":0.003373623,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008565077088571243,"score_gpt":0.2099163968159198,"score_spread":0.2013513197273485,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}