{"id":"W3184459041","doi":"10.1149/ma2021-0121851mtgabs","title":"(Invited) Plasma Immersion Ion Implantation: Technology, Modelling, and Applications for Nanofabrication and 2D Materials","year":2021,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Ion-surface interactions and analysis","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Saskatchewan","funders":"","keywords":"Plasma-immersion ion implantation; Wafer; Ion implantation; Materials science; Nanolithography; Plasma; Fluence; Optoelectronics; Nanotechnology; Fabrication; Silicon; Ion; Chemistry; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000522605,0.0006323258,0.0004751948,0.000412235,0.0003235395,0.00120684,0.0005547744,0.001091308,0.01087548],"category_scores_gemma":[0.0003106647,0.000312225,0.0005666288,0.0004126148,0.0003571034,0.001122229,0.0005369001,0.001016237,0.004871532],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006958688,"about_ca_system_score_gemma":0.0003345773,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006938166,"about_ca_topic_score_gemma":0.001124528,"domain_scores_codex":[0.999808,0.00001920838,0.000005183915,0.00004783991,0.00009638882,0.00002340014],"domain_scores_gemma":[0.9998964,0.00002504295,0.000008202859,0.000006956672,0.000044625,0.00001874493],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0004865717,0.0001227475,0.0009230378,0.003452237,0.0001069369,0.0005680083,0.0004507429,0.01293903,0.282072,0.03493384,0.2734123,0.3905326],"study_design_scores_gemma":[0.00002798304,0.000244039,0.001316426,0.0001263695,0.00004419888,0.0007846556,0.0001146828,0.0114948,0.05794868,0.009584,0.9182535,0.00006050623],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"review","genre_gemma":"methods","genre_scores_codex":[0.05777257,0.476784,0.2521311,0.01599155,0.03075038,0.0003521367,0.001722379,0.002462066,0.1620338],"genre_scores_gemma":[0.1802539,0.2583025,0.09170908,0.002205199,0.009223324,0.0003822364,0.001847113,0.001054188,0.4550224],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.01087548,"threshold_uncertainty_score":0.03638214,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01025221128319623,"score_gpt":0.2293357442296938,"score_spread":0.2190835329464976,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}