{"id":"W3186935103","doi":"10.1116/6.0001125","title":"Green CVD—Toward a sustainable philosophy for thin film deposition by chemical vapor deposition","year":2021,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"ZnO doping and properties","field":"Materials Science","cited_by":42,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"","keywords":"Chemical vapor deposition; Sustainability; Combustion chemical vapor deposition; Nanotechnology; Materials science; Thin film; Sustainable development; Deposition (geology); Environmental science; Carbon film; Political science; Geology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00533498,0.0004466641,0.0004207264,0.0009403891,0.002096059,0.003513999,0.001271785,0.002599398,0.001478675],"category_scores_gemma":[0.001826463,0.0004351595,0.000443168,0.0004294751,0.01046841,0.005346445,0.003115176,0.005998854,0.0005289125],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.003024138,"about_ca_system_score_gemma":0.003264523,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00133864,"about_ca_topic_score_gemma":0.001938348,"domain_scores_codex":[0.9981282,0.000485007,0.00006723577,0.0001713167,0.001030397,0.0001177569],"domain_scores_gemma":[0.9987223,0.0005275552,0.0001013432,0.0001774431,0.0003547422,0.0001166032],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"theoretical_or_conceptual","study_design_gemma":"theoretical_or_conceptual","study_design_scores_codex":[0.000009669714,0.00004396238,0.00009237775,0.0001438587,0.000005195146,0.00004851596,0.0004903051,0.0006740969,0.003076458,0.9796907,0.004140629,0.01158434],"study_design_scores_gemma":[0.0000184759,0.00006376546,0.0001047207,0.0002345761,0.000005725646,0.0001121972,0.0003882005,0.003742727,0.007448205,0.7784626,0.2093906,0.00002821865],"study_design_candidate":"theoretical_or_conceptual","study_design_consensus":"theoretical_or_conceptual","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.02631712,0.06227058,0.4359254,0.209749,0.005253769,0.0003125898,0.0001274227,0.0005115506,0.2595326],"genre_scores_gemma":[0.4440479,0.05466125,0.4134183,0.02365625,0.00174816,0.0006538462,0.00009896133,0.0003732725,0.06134209],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.00533498,"threshold_uncertainty_score":0.0282144,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01323439680320277,"score_gpt":0.2439439949582839,"score_spread":0.2307095981550812,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}