{"id":"W3191138569","doi":"10.1364/cleo_at.2021.jtu3a.85","title":"Ultra-high Q Silica Microcavity Fabrication Using Conventional Photolithography Combined with Chemo-Mechanical Polishing","year":2021,"lang":"en","type":"article","venue":"Conference on Lasers and Electro-Optics","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Victoria","funders":"","keywords":"Polishing; Photolithography; Fabrication; Materials science; Chemical-mechanical planarization; Optoelectronics; Q factor; Optics; Composite material; Resonator","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000327812,0.0004159315,0.0002285509,0.0003572607,0.0003075571,0.0004222347,0.0003885562,0.0003877708,0.001109507],"category_scores_gemma":[0.0004099817,0.0004504167,0.0002234662,0.000194345,0.0004737974,0.0003916206,0.0003884053,0.0004028322,0.0005897251],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003589569,"about_ca_system_score_gemma":0.0005479826,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001193881,"about_ca_topic_score_gemma":0.003580044,"domain_scores_codex":[0.9997882,0.00001216657,0.00002174775,0.00006239769,0.00008379249,0.00003178251],"domain_scores_gemma":[0.999621,0.0001237165,0.00007532563,0.00005634317,0.00008691658,0.00003666292],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000009535306,0.000006041843,0.00007199676,0.00002722918,0.000002460145,0.00004691325,0.00002499379,0.000065796,0.9982492,0.0001965001,0.00004397847,0.001255376],"study_design_scores_gemma":[0.000007768474,0.00007222899,0.0009706144,0.000003276639,0.000006406623,0.0001232853,0.0000134033,0.0006958225,0.9963497,0.00008290134,0.001665695,0.000008887932],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"methods","genre_scores_codex":[0.8700882,0.002001875,0.1165473,0.0003542341,0.0001805721,0.0004088989,0.0005581775,0.001049468,0.008811221],"genre_scores_gemma":[0.8351863,0.000994122,0.1587897,0.0001133264,0.00003728621,0.0001953371,0.0002337277,0.00008622896,0.00436396],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.001193881,"threshold_uncertainty_score":0.0037117,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01310534783898914,"score_gpt":0.2197833748281814,"score_spread":0.2066780269891922,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}