{"id":"W3192585203","doi":"10.1364/ofc.2021.w6a.46","title":"Broadband Polarization Beam Splitters Based on MMI Couplers with Internal Photonic Crystals Fabricated Using 193 nm Photolithography","year":2021,"lang":"en","type":"article","venue":"","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"McGill University; CMC Microsystems (Canada)","funders":"","keywords":"Photolithography; Materials science; Beam splitter; Extinction ratio; Optoelectronics; Photonics; Optics; Broadband; Photonic crystal; Electron-beam lithography; Polarization (electrochemistry); Bandwidth (computing); Physics; Resist; Chemistry; Telecommunications; Laser; Nanotechnology; Wavelength","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004142199,0.0006065152,0.0005129706,0.0004594392,0.0003115269,0.0007789599,0.0006077657,0.0004624947,0.001116418],"category_scores_gemma":[0.0004588044,0.000584571,0.0002558363,0.0004502639,0.000656717,0.0006888952,0.0003477671,0.0006672897,0.0005884556],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000553568,"about_ca_system_score_gemma":0.0002682209,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002625127,"about_ca_topic_score_gemma":0.0006052381,"domain_scores_codex":[0.9995153,0.00002572066,0.00003031505,0.00009413506,0.0002834625,0.00005111181],"domain_scores_gemma":[0.9996144,0.00009473774,0.0001557294,0.00004778578,0.00005419472,0.00003310422],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006478241,0.0000278631,0.000406557,0.00002762895,0.00000640216,0.00004060453,0.00003150499,0.0002828749,0.9946278,0.0006533467,0.0001459413,0.003684836],"study_design_scores_gemma":[0.00001018278,0.00005230421,0.0006795338,0.000002249642,0.000004669317,0.00006548235,0.000006153971,0.001194639,0.9972193,0.00003832348,0.0007215325,0.000005485369],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9507099,0.0006991593,0.03994766,0.0002222549,0.0001327296,0.0001180677,0.0004494663,0.001010077,0.006710653],"genre_scores_gemma":[0.942001,0.0004942931,0.05494214,0.00006528117,0.00004241114,0.00006984264,0.0002032354,0.00008676918,0.002095034],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001116418,"threshold_uncertainty_score":0.004016399,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00893000421248427,"score_gpt":0.2092199936607393,"score_spread":0.200289989448255,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}