{"id":"W3199372241","doi":"","title":"Inductively coupled plasma etching of ultra-shallow Si3N4 and SiO2 nanostructures","year":2014,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Silicon Nanostructures and Photoluminescence","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Etching (microfabrication); Inductively coupled plasma; Plasma; Materials science; Optoelectronics; Plasma etching; Nanostructure; Reactive-ion etching; Nanotechnology; Physics; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001723167,0.0002202346,0.0002080326,0.0001229141,0.0001751948,0.0002667794,0.000337858,0.0003292654,0.001043449],"category_scores_gemma":[0.0002121617,0.0002497266,0.0001895014,0.0001096691,0.0002667193,0.000287217,0.0003130235,0.0002940345,0.0002465067],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004234266,"about_ca_system_score_gemma":0.0001808957,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008768197,"about_ca_topic_score_gemma":0.002255884,"domain_scores_codex":[0.9998765,0.000007816474,0.000004974679,0.00003226186,0.00005181525,0.00002652991],"domain_scores_gemma":[0.9999205,0.00002924264,0.00001215938,0.00001247633,0.0000182673,0.000007391293],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005010359,0.000006142003,0.0001341731,0.00004022617,0.000004754158,0.00005157415,0.00006456731,0.0002331088,0.9977062,0.0002405232,0.00006612646,0.001402476],"study_design_scores_gemma":[0.00001474422,0.00007712183,0.001982213,0.000003184893,0.000005453546,0.00009173567,0.00004469275,0.002670442,0.993145,0.0001381149,0.001822835,0.000004370866],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9854122,0.0005319289,0.006855416,0.0000811116,0.00004867418,0.00002935869,0.0001388157,0.00008665449,0.006815979],"genre_scores_gemma":[0.9844951,0.000286143,0.008215098,0.00004401342,0.00001097467,0.00002256601,0.0001661954,0.00003923556,0.006720591],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001043449,"threshold_uncertainty_score":0.003490627,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01008408335161263,"score_gpt":0.2189211324214311,"score_spread":0.2088370490698185,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}