{"id":"W3200422500","doi":"10.1109/jsen.2021.3113647","title":"A Packaged THz Shunt RF MEMS Switch With Low Insertion Loss","year":2021,"lang":"en","type":"article","venue":"IEEE Sensors Journal","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":19,"is_retracted":false,"has_abstract":true,"ca_institutions":"Western University","funders":"National Key Research and Development Program of China","keywords":"Insertion loss; Materials science; Equivalent circuit; Capacitance; Inductance; Shunt (medical); Microelectromechanical systems; Capacitor; Electrical engineering; Voltage; Optoelectronics; Electronic engineering; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0000746846,0.0003629326,0.0002595173,0.0002087489,0.0001825256,0.0003394631,0.0004114572,0.0003200181,0.001747232],"category_scores_gemma":[0.0001262336,0.0001178623,0.0002846292,0.0002543176,0.0001182164,0.000406937,0.0002181526,0.000262796,0.0005585403],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002053027,"about_ca_system_score_gemma":0.0001177127,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002997092,"about_ca_topic_score_gemma":0.0002966201,"domain_scores_codex":[0.9999051,0.00001036689,0.000003303923,0.00002277223,0.00004354369,0.00001488547],"domain_scores_gemma":[0.9999374,0.000009091894,0.00001631534,0.00001425973,0.00001491607,0.000007978047],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00009713199,0.00004716144,0.0009297641,0.0001265935,0.00003821545,0.0006158275,0.00008242259,0.001516621,0.9732896,0.001140971,0.001748148,0.02036762],"study_design_scores_gemma":[0.00005010124,0.0008670066,0.007237979,0.00001437959,0.0001005241,0.002054414,0.00008633699,0.02503777,0.9409856,0.0004615193,0.02306269,0.00004172775],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8950134,0.001054845,0.08293134,0.0006076705,0.0004867488,0.00006042895,0.0006402013,0.003209774,0.01599561],"genre_scores_gemma":[0.9649736,0.0004219216,0.02691788,0.0001464258,0.0001210877,0.00003755656,0.0003048751,0.0001822445,0.00689442],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001747232,"threshold_uncertainty_score":0.00584501,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007792367472642978,"score_gpt":0.2112099193592528,"score_spread":0.2034175518866098,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}