{"id":"W3210036373","doi":"10.26434/chemrxiv.12173640.v2","title":"Epitaxial GaN using Ga(NMe2)3 and NH3 Plasma by Atomic Layer Deposition","year":2020,"lang":"en","type":"preprint","venue":"ChemRxiv","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"","keywords":"Atomic layer deposition; Epitaxy; Materials science; Chemical vapor deposition; Sapphire; Layer (electronics); Optoelectronics; Gallium; Metalorganic vapour phase epitaxy; Wide-bandgap semiconductor; Stoichiometry; Gallium nitride; Deposition (geology); Analytical Chemistry (journal); Nanotechnology; Chemistry; Metallurgy; Optics; Environmental chemistry; Laser","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001784768,0.0005406477,0.0003202732,0.0002102063,0.0002004564,0.0002867499,0.0005179373,0.0003794651,0.001041499],"category_scores_gemma":[0.00009128032,0.0003074557,0.0002752505,0.0003239945,0.0001859215,0.0001846845,0.0002972831,0.0003834773,0.0006497725],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004447579,"about_ca_system_score_gemma":0.000230233,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001819421,"about_ca_topic_score_gemma":0.00274163,"domain_scores_codex":[0.9998118,0.00001507214,0.000009000819,0.00005480825,0.00006679015,0.0000425183],"domain_scores_gemma":[0.9999563,0.000006482913,0.00001128347,0.000009350132,0.000008685942,0.000007900634],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001873223,0.000008496653,0.0001063642,0.00004477313,0.000004553169,0.00003591719,0.00001180824,0.00010921,0.9983042,0.0001406811,0.00009384265,0.001121358],"study_design_scores_gemma":[0.00002580602,0.00007164362,0.002473393,0.00000702024,0.00001022327,0.0002884541,0.00001138449,0.002049981,0.9880468,0.00007920528,0.006926394,0.000009665102],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"methods","genre_scores_codex":[0.9439826,0.002893272,0.0369158,0.0002065354,0.0001480686,0.0003247481,0.001635301,0.001169536,0.01272407],"genre_scores_gemma":[0.9455004,0.001518516,0.04447047,0.00009832884,0.00002828966,0.0001608184,0.0009532589,0.0001589545,0.007111026],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.001819421,"threshold_uncertainty_score":0.003617704,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02804807996609948,"score_gpt":0.2576150800169891,"score_spread":0.2295670000508896,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}