{"id":"W3213203351","doi":"10.1115/imece2008-67763","title":"Modelling MEMS Resonators Past Pull-In","year":2008,"lang":"en","type":"article","venue":"Volume 13: Nano-Manufacturing Technology; and Micro and Nano Systems, Parts A and B","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Galerkin method; Nonlinear system; Microelectromechanical systems; Partial differential equation; Damper; Beam (structure); Resonator; Ordinary differential equation; Differential equation; Timoshenko beam theory; Control theory (sociology); Mechanics; Physics; Mathematical analysis; Mathematics; Computer science; Engineering; Structural engineering; Optics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003120325,0.0006490991,0.0005204605,0.0003309254,0.0004422887,0.0008935529,0.001218864,0.001647396,0.002246762],"category_scores_gemma":[0.0009076236,0.0005022889,0.0006492792,0.0001960002,0.0008937773,0.001640477,0.0008400949,0.0008607595,0.000681804],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006404695,"about_ca_system_score_gemma":0.0005569691,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002596074,"about_ca_topic_score_gemma":0.00160944,"domain_scores_codex":[0.9997703,0.00003946864,0.00001135506,0.00006110971,0.00008500846,0.00003277037],"domain_scores_gemma":[0.9997618,0.00007058284,0.00006484698,0.00004115302,0.00003919788,0.00002242099],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00007636502,0.00006520432,0.0009577767,0.0001066993,0.00003664831,0.0007740838,0.0003071517,0.8713928,0.0913252,0.02876093,0.0002548398,0.005942461],"study_design_scores_gemma":[0.000008218702,0.00005206789,0.0003086205,0.00000527345,0.000007435367,0.00006201817,0.00002909415,0.9903467,0.005375165,0.002322499,0.001471047,0.00001181359],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3395981,0.0006895946,0.6343867,0.0005310813,0.0001798426,0.0001568855,0.0002584586,0.0003854416,0.02381386],"genre_scores_gemma":[0.9470159,0.0006530605,0.03069993,0.000102984,0.00004626844,0.0001557413,0.0001483305,0.0001261459,0.02105162],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.002596074,"threshold_uncertainty_score":0.007516205,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01121527230164012,"score_gpt":0.1896001954302639,"score_spread":0.1783849231286238,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}