{"id":"W3214451405","doi":"10.32920/ryerson.14644341.v1","title":"A Comparative Analysis Of MEMS Parallel Plate Actuators","year":2021,"lang":"en","type":"preprint","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Toronto Metropolitan University","funders":"","keywords":"Microelectromechanical systems; Voltage; Actuator; Software; Computer science; Deformation (meteorology); Capacitor; Mechanical engineering; Electronic engineering; Engineering; Electrical engineering; Materials science; Nanotechnology; Artificial intelligence; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004207873,0.000433291,0.0003340072,0.0007080329,0.0003381333,0.0004441868,0.0005759213,0.0005143988,0.003489511],"category_scores_gemma":[0.001187513,0.0001791354,0.0004231028,0.0005868493,0.0002491584,0.0004526499,0.0002314272,0.0002266607,0.0003846861],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002962815,"about_ca_system_score_gemma":0.0002838447,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004374808,"about_ca_topic_score_gemma":0.0004422,"domain_scores_codex":[0.9992799,0.00003653615,0.00002460264,0.00008817115,0.0005112549,0.00005946651],"domain_scores_gemma":[0.9993727,0.0002211018,0.00007301545,0.00009464828,0.0002166296,0.00002198326],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0009080895,0.0001079005,0.003329652,0.000768088,0.00009765973,0.0006165084,0.0001297658,0.0506746,0.8526048,0.001992873,0.0008067915,0.0879633],"study_design_scores_gemma":[0.0000452779,0.003407739,0.06539119,0.00005412707,0.0001782944,0.001488065,0.0003116301,0.161465,0.7543558,0.001335066,0.011886,0.00008173256],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9463455,0.002152843,0.03466371,0.0001147831,0.0001135261,0.00007819163,0.0003417688,0.0003109974,0.01587867],"genre_scores_gemma":[0.9885306,0.0004257721,0.007796191,0.00001540393,0.00001708422,0.00003262026,0.0001988217,0.00002796,0.002955545],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003489511,"threshold_uncertainty_score":0.01167363,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0291324537471267,"score_gpt":0.282870562986612,"score_spread":0.2537381092394853,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}