{"id":"W3215444011","doi":"","title":"Highly transparent low capacitance PEALD Al2O3-HfO2 tunnel junction engineering","year":2014,"lang":"fr","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Sherbrooke","funders":"","keywords":"Capacitance; Materials science; Optoelectronics; Atomic layer deposition; Engineering physics; Composite material; Physics; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.003558637,0.0008271766,0.0008621624,0.0002403359,0.0002967782,0.0005963561,0.001222202,0.0006338746,0.0005140112],"category_scores_gemma":[0.000530115,0.0009715316,0.0003691908,0.0003662181,0.0001718354,0.0003352452,0.0002563381,0.0009158292,0.0002629859],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000431109,"about_ca_system_score_gemma":0.0001263622,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.003376848,"about_ca_topic_score_gemma":0.001792505,"domain_scores_codex":[0.9945111,0.001971132,0.001086323,0.001082127,0.000552923,0.000796361],"domain_scores_gemma":[0.9948429,0.0009764988,0.0004502716,0.002183893,0.00116175,0.0003846162],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000322679,0.0005884773,0.0008229876,0.004117818,0.0004682176,0.00001436276,0.01438536,0.07550361,0.7422199,0.1446047,0.002443597,0.01479871],"study_design_scores_gemma":[0.001281802,0.00000157849,0.01252677,0.009854534,0.0002739861,0.00004393031,0.0001748998,0.2839386,0.5523309,0.001536159,0.1358947,0.002142052],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6792548,0.006308703,0.2887415,0.00470815,0.005634656,0.0006930769,0.0001734249,0.0010399,0.01344575],"genre_scores_gemma":[0.9653983,0.002455311,0.02703702,0.00008809549,0.0002689745,0.0001401857,0.000589878,0.0001890332,0.003833246],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2861434,"threshold_uncertainty_score":0.9992735,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01412637945055228,"score_gpt":0.1972427234643133,"score_spread":0.183116344013761,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}