{"id":"W3215444011","doi":"","title":"Highly transparent low capacitance PEALD Al2O3-HfO2 tunnel junction engineering","year":2014,"lang":"fr","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Sherbrooke","funders":"","keywords":"Capacitance; Materials science; Optoelectronics; Atomic layer deposition; Engineering physics; Composite material; Physics; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001040937,0.0002089036,0.0001783493,0.0001828076,0.0002449878,0.0005067263,0.0003525746,0.0004288259,0.001872147],"category_scores_gemma":[0.0001438408,0.00009987801,0.0001239352,0.0001293682,0.0001366854,0.0004598585,0.0002391611,0.0002760421,0.0004195405],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003631409,"about_ca_system_score_gemma":0.000205848,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006504569,"about_ca_topic_score_gemma":0.001721279,"domain_scores_codex":[0.9999062,0.000004591122,0.000002299175,0.00001564041,0.00005066223,0.00002064474],"domain_scores_gemma":[0.9999005,0.00001404347,0.00001639216,0.00001339099,0.00003723705,0.00001846776],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004807891,0.00002359215,0.0001418248,0.00007312612,0.000005594556,0.0001213022,0.00002226357,0.0004192072,0.9937863,0.001020081,0.0005521144,0.003786459],"study_design_scores_gemma":[0.00002345416,0.0001768861,0.002030043,0.00001434736,0.00001452344,0.000308748,0.00005078594,0.009842005,0.9779786,0.0006788574,0.008868209,0.00001350499],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9540274,0.0008545474,0.02242854,0.0003334175,0.0002565417,0.0000417565,0.0003174906,0.0005842113,0.0211561],"genre_scores_gemma":[0.9848554,0.0002038903,0.007662482,0.00003837582,0.00002256656,0.00001519884,0.0001000076,0.00006330006,0.007038788],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001872147,"threshold_uncertainty_score":0.006262958,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01412637945055228,"score_gpt":0.1972427234643133,"score_spread":0.183116344013761,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}