{"id":"W33690698","doi":"10.1371/journal.pone.0247996","title":"Correlation between the Thickness and Variation of Dielectric Conatant on SiOC thin film","year":2009,"lang":"en","type":"article","venue":"The Journal of the Korean Institute of Information and Communication Engineering","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Teck Resources; Fondazione Centro Studi Enel; Kungliga Tekniska Högskolan","keywords":"Dielectric; Refractive index; Materials science; Annealing (glass); Thin film; Composite material; Chemical vapor deposition; Optics; Optoelectronics; Nanotechnology","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001447256,0.00006056451,0.0001154616,0.00005812947,0.0001467173,0.0000294635,0.0003252226,0.00003437109,0.000004443845],"category_scores_gemma":[0.0002870987,0.00002841709,0.00003011023,0.0001252358,0.00008459235,0.0005291657,0.00005731326,0.0001871402,5.015018e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002226887,"about_ca_system_score_gemma":0.00002825916,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003233083,"about_ca_topic_score_gemma":0.000002203673,"domain_scores_codex":[0.999211,0.00007950219,0.0004604805,0.00002229148,0.0001760465,0.0000507426],"domain_scores_gemma":[0.9987619,0.0002485089,0.0005334976,0.0002842824,0.0001548508,0.00001694653],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"observational","study_design_scores_codex":[0.0003569904,0.00009572873,0.0006250028,0.0001883078,0.00008731239,1.168526e-7,0.03332413,0.7709084,0.04551088,0.1157008,0.0002284836,0.03297381],"study_design_scores_gemma":[0.001585177,0.000603978,0.5308558,0.001066384,0.0002351079,0.0001346104,0.001337979,0.4161357,0.03849917,0.005995903,0.003273765,0.0002764254],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.98275,0.0002430922,0.01383464,0.002395496,0.0001718851,0.0001451784,0.000005269513,0.000007061092,0.0004473888],"genre_scores_gemma":[0.9992437,0.0003223674,0.000324639,0.00008794692,0.00001437546,4.992239e-7,0.000001564057,0.000001500439,0.000003342552],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.5302308,"threshold_uncertainty_score":0.1158815,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008272444782447774,"score_gpt":0.2122534416369541,"score_spread":0.2039809968545063,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}