{"id":"W4200066560","doi":"10.1088/1361-6439/ac4005","title":"Accessible, large-area, uniform dose photolithography using a moving light source","year":2021,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"McGill University Health Centre; McGill University","funders":"Fonds de recherche du Québec – Nature et technologies; Natural Sciences and Engineering Research Council of Canada; Canada Research Chairs","keywords":"Photolithography; Microfabrication; Photoresist; Lithography; Materials science; Ultraviolet light; Light source; Optoelectronics; Computer science; Optical proximity correction; Light intensity; Substrate (aquarium); Photomask; Ultraviolet; Resist; Optics; Nanotechnology; Fabrication; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002105642,0.0003258807,0.0002411866,0.0002569942,0.000227449,0.0005449358,0.0006600564,0.0003392744,0.001134804],"category_scores_gemma":[0.0002962193,0.0002120357,0.0002434094,0.0001830263,0.0003100256,0.000404797,0.0004165299,0.0004276106,0.0004466972],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004194262,"about_ca_system_score_gemma":0.0003072192,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005036778,"about_ca_topic_score_gemma":0.0009258254,"domain_scores_codex":[0.9998075,0.00001071072,0.000009433249,0.00004465815,0.0001031998,0.00002445203],"domain_scores_gemma":[0.9997206,0.00004964035,0.00009902279,0.00006806548,0.00004193905,0.00002071584],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002254877,0.00002106268,0.0001806632,0.00004436039,0.000003114223,0.00006231726,0.0000244405,0.001176687,0.9925505,0.0006005918,0.00014334,0.005170381],"study_design_scores_gemma":[0.00001111578,0.0002475216,0.001107196,0.000006749177,0.000006769128,0.0001036764,0.00001414626,0.007114843,0.9879848,0.00008899246,0.003301523,0.00001264813],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8849424,0.0006972865,0.1049429,0.0001938655,0.000104589,0.0001712346,0.0003120426,0.001561784,0.007073991],"genre_scores_gemma":[0.8970732,0.0003340913,0.09952869,0.00005521828,0.00002432416,0.00008120952,0.0001535442,0.0001537592,0.002595907],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001134804,"threshold_uncertainty_score":0.003796339,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007443128454030642,"score_gpt":0.2090492986906284,"score_spread":0.2016061702365978,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}