{"id":"W4200127405","doi":"10.1021/acsaelm.1c01105","title":"Hf<sub>1–<i>x</i></sub>Zr<sub><i>x</i></sub>O<sub>2</sub>/ZrO<sub>2</sub> Nanolaminate Thin Films as a High-κ Dielectric","year":2021,"lang":"en","type":"article","venue":"ACS Applied Electronic Materials","topic":"Ferroelectric and Negative Capacitance Devices","field":"Engineering","cited_by":45,"is_retracted":false,"has_abstract":true,"ca_institutions":"Queen's University","funders":"National Research Foundation of Korea; Grantová Agentura České Republiky","keywords":"Dielectric; Materials science; Thin film; Ferroelectricity; Orthorhombic crystal system; Hysteresis; Tetragonal crystal system; Permittivity; Polarization (electrochemistry); Antiferroelectricity; Analytical Chemistry (journal); Condensed matter physics; Optoelectronics; Crystallography; Nanotechnology; Crystal structure; Chemistry; Physical chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00004695826,0.000263781,0.0001093342,0.0000953437,0.0001102484,0.000196346,0.0001660936,0.0001803696,0.000549652],"category_scores_gemma":[0.00006339879,0.000137307,0.00009047137,0.00007883367,0.0001131411,0.0001934524,0.00009465043,0.000219282,0.0001321526],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001292649,"about_ca_system_score_gemma":0.0000647202,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000645672,"about_ca_topic_score_gemma":0.001529987,"domain_scores_codex":[0.9999574,0.000003129404,0.000002942232,0.000008887067,0.00001657383,0.00001095753],"domain_scores_gemma":[0.9999585,0.000006046835,0.00001899346,0.000004203599,0.00000758909,0.000004602427],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000008193168,0.000002356668,0.0001377635,0.00001644493,0.000001904383,0.00001675453,0.000004914863,0.00002887182,0.9993574,0.00002292517,0.000007716114,0.0003948347],"study_design_scores_gemma":[0.000003517411,0.0000301114,0.002908979,0.000001771302,0.000006481032,0.00006185166,0.00002875903,0.0004967625,0.9959528,0.00001266961,0.0004940436,0.000002077068],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9973802,0.0005655586,0.001202004,0.00002749502,0.000008584308,0.000006227915,0.00006350983,0.00002769756,0.0007187367],"genre_scores_gemma":[0.9974247,0.0003375743,0.001714593,0.00001451808,0.000004450287,0.000005993514,0.00006467775,0.00000578667,0.0004278209],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.000645672,"threshold_uncertainty_score":0.001838744,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004435612807333901,"score_gpt":0.1837243628796384,"score_spread":0.1792887500723045,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}