{"id":"W4200133765","doi":"10.3390/coatings11121506","title":"Recent Advances in Hollow Cathode Technology for Plasma-Enhanced ALD—Plasma Surface Modifications for Aluminum and Stainless-Steel Cathodes","year":2021,"lang":"en","type":"article","venue":"Coatings","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"National Research Council Canada","keywords":"Cathode; Materials science; Plasma; Surface modification; Oxide; Aluminium; Langmuir probe; Work function; Hot cathode; Sputtering; Cathodic arc deposition; Layer (electronics); Chemical engineering; Metallurgy; Nanotechnology; Electrode; Thin film; Chemistry; Cathodic protection; Plasma diagnostics; Electrochemistry","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0009639738,0.0005927291,0.0004410523,0.0007240843,0.0002168095,0.0007170687,0.0007212812,0.0006002797,0.001780027],"category_scores_gemma":[0.0005374172,0.0004026919,0.0006049763,0.0007084304,0.0004276736,0.001037834,0.000564858,0.0008040974,0.001170664],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006764595,"about_ca_system_score_gemma":0.0003853332,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004458642,"about_ca_topic_score_gemma":0.0004624924,"domain_scores_codex":[0.9994943,0.00005060815,0.0000473455,0.0001234116,0.0002477457,0.0000366264],"domain_scores_gemma":[0.9995282,0.0001030283,0.00007804669,0.00005203957,0.000205481,0.0000332222],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001278369,0.00007816516,0.000551414,0.005942462,0.00007861101,0.0003898089,0.0001866051,0.001407494,0.7125313,0.01250612,0.003140558,0.2630597],"study_design_scores_gemma":[0.0000191498,0.0004598123,0.002261913,0.0002050239,0.00008082847,0.002487485,0.0001006917,0.003744567,0.5581116,0.002830695,0.4296282,0.00007006685],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"review","genre_gemma":"empirical","genre_scores_codex":[0.06533568,0.7473466,0.1525237,0.002098133,0.001372393,0.0001617623,0.0002911463,0.0008981103,0.02997249],"genre_scores_gemma":[0.3118622,0.4772231,0.1823091,0.001407496,0.001359534,0.0001757296,0.0009151738,0.0003083818,0.02443936],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.001780027,"threshold_uncertainty_score":0.005954802,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02309659309848415,"score_gpt":0.2706318108381072,"score_spread":0.2475352177396231,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}