{"id":"W4205174199","doi":"10.1364/ao.449825","title":"Polarimetric photoluminescence microscope for strain imaging on semiconductor devices","year":2022,"lang":"en","type":"article","venue":"Applied Optics","topic":"Near-Field Optical Microscopy","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Semiconductor; Polarization (electrochemistry); Polarimetry; Anisotropy; Microscopy; Microscope; Lithography; Photoluminescence; Photolithography","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005719584,0.0006278729,0.0004758258,0.001268868,0.0004894431,0.0007328721,0.0005973954,0.0007618066,0.01719096],"category_scores_gemma":[0.0004921397,0.0004801389,0.0002929656,0.000864252,0.0003938318,0.0008686905,0.0009779097,0.001884165,0.005940295],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0007207831,"about_ca_system_score_gemma":0.0003865712,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002669679,"about_ca_topic_score_gemma":0.000579378,"domain_scores_codex":[0.9996381,0.000102933,0.00001897572,0.00006604104,0.0001358627,0.00003812067],"domain_scores_gemma":[0.9997031,0.0001209428,0.00002332216,0.00007227463,0.00005269954,0.00002755522],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001794455,0.00006872618,0.0003514231,0.0004147475,0.00002616664,0.0002251486,0.00008689154,0.0008783626,0.8947682,0.02043939,0.00865074,0.07391082],"study_design_scores_gemma":[0.0001197576,0.0003245673,0.003139431,0.0002090375,0.00003805174,0.00207466,0.0001175276,0.04754505,0.7823365,0.009652042,0.1543468,0.00009664158],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"methods","genre_scores_codex":[0.03717605,0.006825755,0.8835076,0.0009717353,0.0004310845,0.0005251426,0.001827913,0.01229934,0.05643542],"genre_scores_gemma":[0.1811945,0.00393571,0.7883519,0.0006310125,0.0001215349,0.001207321,0.001683607,0.0009858763,0.0218886],"genre_candidate":"methods","genre_consensus":"methods","teacher_disagreement_score":0.01719096,"threshold_uncertainty_score":0.05750948,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009907365440908028,"score_gpt":0.2272258569560079,"score_spread":0.2173184915150999,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}