{"id":"W4205723077","doi":"10.1364/oe.446758","title":"SiN half-etch horizontal slot waveguides for integrated photonics: numerical modeling, fabrication, and characterization of passive components","year":2022,"lang":"en","type":"article","venue":"Optics Express","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Fabrication; Materials science; Resonator; Optics; Waveguide; Photonics; Optoelectronics; Wavelength; Layer (electronics); Photonic crystal; Characterization (materials science); Coupled mode theory; Refractive index; Physics; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002651307,0.0002711603,0.0001800086,0.00009302131,0.000146504,0.0003424196,0.0003321483,0.0002926976,0.0005462757],"category_scores_gemma":[0.0002874539,0.0002505145,0.0002266203,0.0001377699,0.0002332461,0.00033427,0.000124013,0.0002696041,0.0001821468],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000363257,"about_ca_system_score_gemma":0.0006887445,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008986862,"about_ca_topic_score_gemma":0.001708461,"domain_scores_codex":[0.9999074,0.00001210178,0.000003349568,0.00001249155,0.00005458787,0.00001014654],"domain_scores_gemma":[0.9998466,0.0000610415,0.00002983639,0.00003006633,0.00002750781,0.000004943345],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001243706,0.0001135626,0.002903465,0.000276131,0.00004795153,0.0001202431,0.0001394576,0.3487933,0.6077676,0.01274587,0.0004521399,0.02651585],"study_design_scores_gemma":[0.0000122772,0.00009097215,0.0009466875,0.000006312111,0.000007996495,0.00004668028,0.0000215884,0.8945345,0.1015719,0.0005716023,0.002179914,0.000009563726],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.433159,0.0004084817,0.5602614,0.00008593644,0.00003691585,0.00007006741,0.000337033,0.0005132434,0.005127979],"genre_scores_gemma":[0.6967561,0.0003824651,0.3004055,0.00001598739,0.000007504016,0.0001222957,0.0002611972,0.00007378563,0.001975153],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.0008986862,"threshold_uncertainty_score":0.002635658,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01497984378356678,"score_gpt":0.2233939758729146,"score_spread":0.2084141320893478,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}