{"id":"W4206039464","doi":"10.1063/5.0074694","title":"Temperature frequency stability study of extensional mode N-doped silicon MEMS resonator","year":2022,"lang":"en","type":"article","venue":"AIP Advances","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Windsor","funders":"RES’EAU-WaterNET","keywords":"Resonator; Materials science; Microelectromechanical systems; Silicon; Temperature coefficient; Vibration; Normal mode; Finite element method; Doping; Resonance (particle physics); Condensed matter physics; Composite material; Optoelectronics; Acoustics; Physics; Thermodynamics; Atomic physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001097015,0.0001636789,0.000261004,0.00007561097,0.0001526592,0.000005816729,0.0002616291,0.00004363368,0.0001001348],"category_scores_gemma":[0.00005948363,0.0001499705,0.00004509408,0.0003027754,0.00006056236,0.0002380442,0.0001262907,0.0003635389,0.000001418307],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008466789,"about_ca_system_score_gemma":0.00001871633,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003335842,"about_ca_topic_score_gemma":0.0001454611,"domain_scores_codex":[0.9989281,0.00001605806,0.0002692291,0.0002754461,0.00029629,0.0002148916],"domain_scores_gemma":[0.9993778,0.00008089146,0.00005309983,0.0004028074,0.00005105493,0.00003437208],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000355598,0.0003454803,0.003241561,0.00005537986,0.00003456163,0.00002136127,0.0006430605,0.02375376,0.9666983,0.0004042558,0.0001730386,0.004593702],"study_design_scores_gemma":[0.003188635,0.002849548,0.01899663,0.00006069241,0.00006707363,0.00003482443,0.05014223,0.001839796,0.8552232,0.03799084,0.02811119,0.001495277],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9926147,0.005901102,0.00001999217,0.0000354296,0.0003442802,0.0003296712,0.00006554653,0.0004224878,0.0002668231],"genre_scores_gemma":[0.9985945,0.0002676187,0.0008778102,0.00001985576,0.00002556752,0.0001579267,0.000007689595,0.00002457259,0.00002442485],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.111475,"threshold_uncertainty_score":0.611562,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01238396736086428,"score_gpt":0.2503760845755403,"score_spread":0.237992117214676,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}