{"id":"W4206400118","doi":"10.1109/tsm.2021.3053077","title":"IEEE Transactions on Semiconductor Manufacturing publication information","year":2021,"lang":"en","type":"article","venue":"IEEE Transactions on Semiconductor Manufacturing","topic":"Manufacturing Process and Optimization","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"Canadian Standards Association","funders":"","keywords":"Semiconductor device fabrication; Manufacturing engineering; Computer science; Engineering; Semiconductor industry; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.0007660916,0.0009394948,0.001202522,0.002302145,0.0007427269,0.002503111,0.0009707595,0.001480765,0.3089144],"category_scores_gemma":[0.001611199,0.0003912708,0.0005540504,0.003003052,0.000284772,0.00158689,0.0009330195,0.001193921,0.1804322],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0007852079,"about_ca_system_score_gemma":0.001750453,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0021443,"about_ca_topic_score_gemma":0.004660495,"domain_scores_codex":[0.9992571,0.00004900356,0.00003862632,0.00006466329,0.0005208649,0.0000696311],"domain_scores_gemma":[0.9987442,0.0001674008,0.00004561268,0.0002150919,0.0007393061,0.00008824314],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"not_applicable","study_design_gemma":"not_applicable","study_design_scores_codex":[0.0001133517,0.0001343469,0.0003806299,0.0003563063,0.00001721455,0.00006622716,0.00002292524,0.002367559,0.003664267,0.01083274,0.6135255,0.368519],"study_design_scores_gemma":[0.00001672099,0.00006280549,0.001273594,0.0001473705,0.00003151491,0.0001354575,0.00003374397,0.006772984,0.002718687,0.007230774,0.9815532,0.00002316941],"study_design_candidate":"not_applicable","study_design_consensus":"not_applicable","genre_codex":"other","genre_gemma":"other","genre_scores_codex":[0.006317405,0.01974059,0.05711867,0.008031718,0.03809696,0.0003056946,0.008655229,0.003439937,0.8582938],"genre_scores_gemma":[0.02792464,0.01627979,0.01013966,0.0008612653,0.002525191,0.00009771172,0.01061639,0.0007612109,0.9307941],"genre_candidate":"other","genre_consensus":"other","teacher_disagreement_score":0.3089144,"threshold_uncertainty_score":0.9857497,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01513047829741856,"score_gpt":0.2129287622320379,"score_spread":0.1977982839346193,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}